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Sinichiro Izumi
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Kumamoto, JP
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last 30 patents
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Patent Grant
Washing apparatus, and washing method
Patent number
5,887,604
Issue date
Mar 30, 1999
Tokyo Electron Limited
Shinya Murakami
B08 - CLEANING
Information
Patent Grant
Method for washing objects
Patent number
5,782,990
Issue date
Jul 21, 1998
Tokyo Electron Limited
Shinya Murakami
B08 - CLEANING
Information
Patent Grant
Washing apparatus, and washing method
Patent number
5,671,764
Issue date
Sep 30, 1997
Tokyo Electron Limited
Shinya Murakami
B08 - CLEANING
Information
Patent Grant
Washing apparatus, and washing method
Patent number
5,488,964
Issue date
Feb 6, 1996
Tokyo Electron Limited
Shinya Murakami
B08 - CLEANING