Sinya Sasaki

Follow

Person

Miyagi, JP

People

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT PEDESTAL AND PLASMA PROCESSING APPARATUS
- Publication number 20210104385
- Publication date Apr 8, 2021
- TOKYO ELECTRON LIMITED
- Ryou SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210005477
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Ryou Son
- H01 - BASIC ELECTRIC ELEMENTS