Siqing LU

Person

Seongnam-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 12,106,945
- Issue date Oct 1, 2024
- Samsung Electronics Co., Ltd.
- Siqing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck and wafer etching device including the same
- Patent number 11,728,198
- Issue date Aug 15, 2023
- Samsung Electronics Co., Ltd.
- Myoung-Soo Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generator, cleaning liquid processing apparatus, semiconduct...
- Patent number 11,545,372
- Issue date Jan 3, 2023
- Samsung Electronics Co., Ltd.
- Beom Jin Yoo
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,538,697
- Issue date Dec 27, 2022
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,244,839
- Issue date Feb 8, 2022
- Samsung Electronics Co., Ltd.
- Cheonkyu Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of manufacturing a semiconductor device
- Patent number 10,529,618
- Issue date Jan 7, 2020
- Samsung Electronics Co., Ltd.
- Siqing Lu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220076931
- Publication date Mar 10, 2022
- Samsung Electronics Co., Ltd.
- Siqing Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210384012
- Publication date Dec 9, 2021
- Samsung Electronics Co., Ltd.
- Jinhyuk CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...
- Publication number 20210151300
- Publication date May 20, 2021
- Samsung Electronics Co., Ltd.
- Jieun JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210074558
- Publication date Mar 11, 2021
- Samsung Electronics Co., Ltd.
- Sang Ki NAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200176230
- Publication date Jun 4, 2020
- Samsung Electronics Co., Ltd.
- Siqing LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20200066557
- Publication date Feb 27, 2020
- Samsung Electronics Co., Ltd.
- Cheonkyu LEE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTROSTATIC CHUCK AND WAFER ETCHING DEVICE INCLUDING THE SAME
- Publication number 20200066565
- Publication date Feb 27, 2020
- Samsung Electronics Co., Ltd.
- Myoung-soo Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATOR, CLEANING LIQUID PROCESSING APPARATUS, SEMICONDUCT...
- Publication number 20200020551
- Publication date Jan 16, 2020
- Samsung Electronics Co., Ltd.
- Beom Jin YOO
- B08 - CLEANING
Information Patent Application
Plasma Processing Apparatus and Method of Manufacturing Semiconduct...
- Publication number 20190198296
- Publication date Jun 27, 2019
- Samsung Electronics Co., Ltd.
- SIQING LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20180358262
- Publication date Dec 13, 2018
- Samsung Electronics Co., Ltd.
- Siqing LU
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Plasma processing apparatus and method of manufacturing semiconduct...

Electrostatic chuck and wafer etching device including the same

Plasma generator, cleaning liquid processing apparatus, semiconduct...

Substrate processing apparatus

Plasma processing apparatus

Methods of manufacturing a semiconductor device

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...

SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...

PLASMA PROCESSING APPARATUS

ELECTROSTATIC CHUCK AND WAFER ETCHING DEVICE INCLUDING THE SAME

PLASMA GENERATOR, CLEANING LIQUID PROCESSING APPARATUS, SEMICONDUCT...

Plasma Processing Apparatus and Method of Manufacturing Semiconduct...

METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE