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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching apparatus comprising a nozzle oscillating unit
- Patent number 10,176,972
- Issue date Jan 8, 2019
- Disco Corporation
- Yoshio Watanabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING APPARATUS
- Publication number 20160343544
- Publication date Nov 24, 2016
- Disco Corporation
- Yoshio Watanabe
- H01 - BASIC ELECTRIC ELEMENTS