Siu Fai Cheng

Person

Culver City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Low temperature atmospheric pressure plasma for cleaning and activa...
- Patent number 11,518,082
- Issue date Dec 6, 2022
- Surfx Technologies LLC
- Siu Fai Cheng
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Shadow ring for modifying wafer edge and bevel deposition
- Patent number 11,136,665
- Issue date Oct 5, 2021
- Applied Materials, Inc.
- Dale Du Bois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature atmospheric pressure plasma for cleaning and activa...
- Patent number 10,800,092
- Issue date Oct 13, 2020
- Surfx Technologies LLC
- Siu Fai Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shadow ring for modifying wafer edge and bevel deposition
- Patent number 10,227,695
- Issue date Mar 12, 2019
- Applied Materials, Inc.
- Dale R. Du Bois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Preparing tool surfaces for composites
- Patent number 10,118,315
- Issue date Nov 6, 2018
- Surfx Technologies LLC
- Siu F. Cheng
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Low temperature atmospheric pressure plasma applications
- Patent number 10,032,609
- Issue date Jul 24, 2018
- Surfx Technologies LLC
- Siu Fai Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Argon and helium plasma apparatus and methods
- Patent number 9,406,485
- Issue date Aug 2, 2016
- Surfx Technologies LLC
- Siu Fai Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Passivating glue layer to improve amorphous carbon to metal adhesion
- Patent number 8,569,105
- Issue date Oct 29, 2013
- Applied Materials, Inc.
- Siu F. Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Amorphous carbon deposition method for improved stack defectivity
- Patent number 8,349,741
- Issue date Jan 8, 2013
- Applied Materials, Inc.
- Hang Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Passivating glue layer to improve amorphous carbon to metal adhesion
- Patent number 8,278,139
- Issue date Oct 2, 2012
- Applied Materials, Inc.
- Siu F. Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Amorphous carbon deposition method for improved stack defectivity
- Patent number 8,227,352
- Issue date Jul 24, 2012
- Applied Materials, Inc.
- Hang Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nonplanar faceplate for a plasma processing chamber
- Patent number 8,097,082
- Issue date Jan 17, 2012
- Applied Materials, Inc.
- Jianhua Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEVICE FOR PLASMA TREATMENT OF ELECTRONIC MATERIALS
- Publication number 20230049702
- Publication date Feb 16, 2023
- Surfx Technologies LLC
- Thomas Scott Williams
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR PLASMA TREATMENT OF ELECTRONIC MATERIALS
- Publication number 20200152430
- Publication date May 14, 2020
- Surfx Technologies LLC
- Thomas Scott Williams
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHADOW RING FOR MODIFYING WAFER EDGE AND BEVEL DEPOSITION
- Publication number 20190153592
- Publication date May 23, 2019
- Applied Materials, Inc.
- Dale Du BOIS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITROGEN DOPED AMORPHOUS CARBON HARDMASK
- Publication number 20160086794
- Publication date Mar 24, 2016
- Applied Materials, Inc.
- Siu F. CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NITROGEN DOPED AMORPHOUS CARBON HARDMASK
- Publication number 20140370711
- Publication date Dec 18, 2014
- Applied Materials, Inc.
- Siu F. CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVATING GLUE LAYER TO IMPROVE AMORPHOUS CARBON TO METAL ADHESION
- Publication number 20120208339
- Publication date Aug 16, 2012
- Applied Materials, Inc.
- Siu F. Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AMORPHOUS CARBON DEPOSITION METHOD FOR IMPROVED STACK DEFECTIVITY
- Publication number 20120208374
- Publication date Aug 16, 2012
- Applied Materials, Inc.
- Hang Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VARIABLE RESISTANCE MEMORY ELEMENT AND FABRICATION METHODS
- Publication number 20120043518
- Publication date Feb 23, 2012
- Applied Materials, Inc.
- Siu F. CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS CARBON DEPOSITION METHOD FOR IMPROVED STACK DEFECTIVITY
- Publication number 20120015521
- Publication date Jan 19, 2012
- Applied Materials, Inc.
- Hang Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITROGEN DOPED AMORPHOUS CARBON HARDMASK
- Publication number 20110244142
- Publication date Oct 6, 2011
- Applied Materials, Inc.
- SIU F. CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHADOW RING FOR MODIFYING WAFER EDGE AND BEVEL DEPOSITION
- Publication number 20110159211
- Publication date Jun 30, 2011
- Applied Materials, Inc.
- Dale R. Du Bois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVATING GLUE LAYER TO IMPROVE AMORPHOUS CARBON TO METAL ADHESION
- Publication number 20110076826
- Publication date Mar 31, 2011
- Applied Materials, Inc.
- Siu F. Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NONPLANAR FACEPLATE FOR A PLASMA PROCESSING CHAMBER
- Publication number 20090269512
- Publication date Oct 29, 2009
- APPLIED MATERIALS, INC.
- Jianhua Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Siu Fai Cheng

Person

Patents Grantslast 30 patents

Low temperature atmospheric pressure plasma for cleaning and activa...

Shadow ring for modifying wafer edge and bevel deposition

Low temperature atmospheric pressure plasma for cleaning and activa...

Shadow ring for modifying wafer edge and bevel deposition

Preparing tool surfaces for composites

Low temperature atmospheric pressure plasma applications

Argon and helium plasma apparatus and methods

Passivating glue layer to improve amorphous carbon to metal adhesion

Amorphous carbon deposition method for improved stack defectivity

Passivating glue layer to improve amorphous carbon to metal adhesion

Amorphous carbon deposition method for improved stack defectivity

Nonplanar faceplate for a plasma processing chamber

Patents Applicationslast 30 patents

DEVICE FOR PLASMA TREATMENT OF ELECTRONIC MATERIALS

DEVICE AND METHOD FOR PLASMA TREATMENT OF ELECTRONIC MATERIALS

SHADOW RING FOR MODIFYING WAFER EDGE AND BEVEL DEPOSITION

NITROGEN DOPED AMORPHOUS CARBON HARDMASK

NITROGEN DOPED AMORPHOUS CARBON HARDMASK

PASSIVATING GLUE LAYER TO IMPROVE AMORPHOUS CARBON TO METAL ADHESION

AMORPHOUS CARBON DEPOSITION METHOD FOR IMPROVED STACK DEFECTIVITY

VARIABLE RESISTANCE MEMORY ELEMENT AND FABRICATION METHODS

AMORPHOUS CARBON DEPOSITION METHOD FOR IMPROVED STACK DEFECTIVITY

NITROGEN DOPED AMORPHOUS CARBON HARDMASK

SHADOW RING FOR MODIFYING WAFER EDGE AND BEVEL DEPOSITION

PASSIVATING GLUE LAYER TO IMPROVE AMORPHOUS CARBON TO METAL ADHESION

NONPLANAR FACEPLATE FOR A PLASMA PROCESSING CHAMBER