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Siu Tang NG
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Cupertino, CA, US
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last 30 patents
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Patent Grant
Plasma generation source employing dielectric conduit assemblies ha...
Patent number
9,155,184
Issue date
Oct 6, 2015
Applied Materials, Inc.
Siu Tang Ng
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
SINGLE RING DESIGN FOR HIGH YIELD, SUBSTRATE EXTREME EDGE DEFECT RE...
Publication number
20160099162
Publication date
Apr 7, 2016
Applied Materials, Inc.
Siu Tang NG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA GENERATION SOURCE EMPLOYING DIELECTRIC CONDUIT ASSEMBLIES HA...
Publication number
20150137681
Publication date
May 21, 2015
Applied Materials, Inc.
Siu Tang NG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD OF PERFORMING AN IN SITU CHAMBER CLEAN
Publication number
20120094499
Publication date
Apr 19, 2012
Siu Tang Ng
B08 - CLEANING