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Sivananda K. Kanakasabapathy
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Niskayuna, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Chamfer-less via integration scheme
Patent number
11,987,876
Issue date
May 21, 2024
Lam Research Corporation
Sivananda Krishnan Kanakasabapathy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Forming a sacrificial liner for dual channel devices
Patent number
11,894,462
Issue date
Feb 6, 2024
Adeia Semiconductor Solutions LLC
Huiming Bu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned pattern formation for a semiconductor device
Patent number
11,646,221
Issue date
May 9, 2023
International Business Machines Corporation
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tin oxide mandrels in patterning
Patent number
11,355,353
Issue date
Jun 7, 2022
Lam Research Corporation
Jengyi Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fin cut to prevent replacement gate collapse on STI
Patent number
11,315,922
Issue date
Apr 26, 2022
International Business Machines Corporation
Andrew M. Greene
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Additive core subtractive liner for metal cut etch processes
Patent number
11,276,767
Issue date
Mar 15, 2022
International Business Machines Corporation
Ruqiang Bao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned pattern formation for a semiconductor device
Patent number
11,227,793
Issue date
Jan 18, 2022
International Business Machines Corporation
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Forming a sacrificial liner for dual channel devices
Patent number
11,189,729
Issue date
Nov 30, 2021
Tessera, Inc.
Huiming Bu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Additive core subtractive liner for metal cut etch processes
Patent number
11,152,489
Issue date
Oct 19, 2021
International Business Machines Corporation
Ruqiang Bao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structures with deep trench capacitor and methods of...
Patent number
11,145,658
Issue date
Oct 12, 2021
International Business Machines Corporation
Kevin K. Chan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor structures with deep trench capacitor and methods of...
Patent number
11,107,821
Issue date
Aug 31, 2021
International Business Machines Corporation
Kevin K. Chan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Forming a sacrificial liner for dual channel devices
Patent number
11,094,824
Issue date
Aug 17, 2021
Tessera, Inc.
Huiming Bu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned contacts for vertical field effect transistors
Patent number
11,081,566
Issue date
Aug 3, 2021
International Business Machines Corporation
Su Chen Fan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Additive core subtractive liner for metal cut etch processes
Patent number
11,075,281
Issue date
Jul 27, 2021
International Business Machines Corporation
Ruqiang Bao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structures with deep trench capacitor and methods of...
Patent number
11,056,493
Issue date
Jul 6, 2021
International Business Machines Corporation
Kevin K. Chan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Self aligned pattern formation post spacer etchback in tight pitch...
Patent number
11,018,007
Issue date
May 25, 2021
Tessera, Inc.
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Epitaxial oxide fin segments to prevent strained semiconductor fin...
Patent number
10,957,694
Issue date
Mar 23, 2021
International Business Machines Corporation
Karthik Balakrishnan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned quadruple patterning (SAQP) for routing layouts includ...
Patent number
10,957,583
Issue date
Mar 23, 2021
International Business Machines Corporation
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conformal doping for punch through stopper in fin field effect tran...
Patent number
10,937,867
Issue date
Mar 2, 2021
International Business Machines Corporation
Huiming Bu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Utilizing multilayer gate spacer to reduce erosion of semiconductor...
Patent number
10,790,393
Issue date
Sep 29, 2020
International Business Machines Corporation
Andrew M. Greene
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conformal doping for punch through stopper in fin field effect tran...
Patent number
10,741,647
Issue date
Aug 11, 2020
International Business Machines Corporation
Huiming Bu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bottom contact formation for vertical transistor devices
Patent number
10,727,317
Issue date
Jul 28, 2020
International Business Machines Corporation
Su Chen Fan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High aspect ratio gates
Patent number
10,707,083
Issue date
Jul 7, 2020
ELPIS TECHNOLOGIES INC.
Kangguo Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low undercut N-P work function metal patterning in nanosheet replac...
Patent number
10,629,495
Issue date
Apr 21, 2020
International Business Machines Corporation
Indira Seshadri
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Fin cut to prevent replacement gate collapse on STI
Patent number
10,622,352
Issue date
Apr 14, 2020
International Business Machines Corporation
Andrew M. Greene
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned patterning methods which implement directed self-assembly
Patent number
10,613,438
Issue date
Apr 7, 2020
International Business Machines Corporation
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Preventing strained fin relaxation
Patent number
10,615,278
Issue date
Apr 7, 2020
International Business Machines Corporation
Kangguo Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Additive core subtractive liner for metal cut etch processes
Patent number
10,600,884
Issue date
Mar 24, 2020
International Business Machines Corporation
Ruqiang Bao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Forming a sacrificial liner for dual channel devices
Patent number
10,593,802
Issue date
Mar 17, 2020
Tessera, Inc.
Huiming Bu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Static random access memory (SRAM) density scaling by using middle...
Patent number
10,593,679
Issue date
Mar 17, 2020
International Business Machines Corporation
Veeraraghavan S. Basker
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND PROCESS FOR EUV DRY RESIST SENSITIZATION BY GAS PHASE...
Publication number
20240192590
Publication date
Jun 13, 2024
LAM RESEARCH CORPORATION
Sivananda Krishnan Kanakasabapathy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
Publication number
20240145272
Publication date
May 2, 2024
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING PHOTO-SENSITIVE HYBRID FILMS
Publication number
20230314946
Publication date
Oct 5, 2023
LAM RESEARCH CORPORATION
Eric Calvin Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
Publication number
20230290657
Publication date
Sep 14, 2023
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADVANCED SELF ALIGNED MULTIPLE PATTERNING USING TIN OXIDE
Publication number
20230238238
Publication date
Jul 27, 2023
LAM RESEARCH CORPORATION
Akhil Singhal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE AND METHOD TO ACHIEVE POSITIVE TONE DRY DEVELOP BY A HERM...
Publication number
20230152701
Publication date
May 18, 2023
LAM RESEARCH CORPORATION
Sivananda Krishnan Kanakasabapathy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CORE REMOVAL
Publication number
20230066676
Publication date
Mar 2, 2023
LAM RESEARCH CORPORATION
Sivananda Krishnan KANAKASABAPATHY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
Publication number
20230045336
Publication date
Feb 9, 2023
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMING A SACRIFICIAL LINER FOR DUAL CHANNEL DEVICES
Publication number
20220069118
Publication date
Mar 3, 2022
Tessera, Inc.
Huiming Bu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF ALIGNED PATTERN FORMATION POST SPACER ETCHBACK IN TIGHT PITCH...
Publication number
20210280422
Publication date
Sep 9, 2021
Tessera, Inc.
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE MANDRELS IN PATTERNING
Publication number
20210265173
Publication date
Aug 26, 2021
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHAMFER-LESS VIA INTEGRATION SCHEME
Publication number
20210017643
Publication date
Jan 21, 2021
LAM RESEARCH CORPORATION
Sivananda Krishnan Kanakasabapathy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF-ALIGNED CONTACTS FOR VERTICAL FIELD EFFECT TRANSISTORS
Publication number
20200295156
Publication date
Sep 17, 2020
International Business Machines Corporation
Su Chen Fan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fin Cut to Prevent Replacement Gate Collapse on STI
Publication number
20200219874
Publication date
Jul 9, 2020
International Business Machines Corporation
Andrew M. Greene
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BOTTOM CONTACT FORMATION FOR VERTICAL TRANSISTOR DEVICES
Publication number
20200111895
Publication date
Apr 9, 2020
International Business Machines Corporation
Su Chen Fan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMING A SACRIFICIAL LINER FOR DUAL CHANNEL DEVICES
Publication number
20200091336
Publication date
Mar 19, 2020
International Business Machines Corporation
Huiming Bu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF-ALIGNED PATTERN FORMATION FOR A SEMICONDUCTOR DEVICE
Publication number
20200090985
Publication date
Mar 19, 2020
International Business Machines Corporation
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMING A SACRIFICIAL LINER FOR DUAL CHANNEL DEVICES
Publication number
20200083364
Publication date
Mar 12, 2020
International Business Machines Corporation
Huiming Bu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADDITIVE CORE SUBTRACTIVE LINER FOR METAL CUT ETCH PROCESSES
Publication number
20200083350
Publication date
Mar 12, 2020
International Business Machines Corporation
Ruqiang Bao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADDITIVE CORE SUBTRACTIVE LINER FOR METAL CUT ETCH PROCESSES
Publication number
20200083349
Publication date
Mar 12, 2020
International Business Machines Corporation
Ruqiang Bao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF ALIGNED PATTERN FORMATION POST SPACER ETCHBACK IN TIGHT PITCH...
Publication number
20200075336
Publication date
Mar 5, 2020
International Business Machines Corporation
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURES WITH DEEP TRENCH CAPACITOR AND METHODS OF...
Publication number
20200051984
Publication date
Feb 13, 2020
International Business Machines Corporation
Kevin K. Chan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SELF-ALIGNED QUADRUPLE PATTERNING (SAQP) FOR ROUTING LAYOUTS INCLUD...
Publication number
20190393082
Publication date
Dec 26, 2019
International Business Machines Corporation
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONFORMAL DOPING FOR PUNCH THROUGH STOPPER IN FIN FIELD EFFECT TRAN...
Publication number
20190341458
Publication date
Nov 7, 2019
International Business Machines Corporation
Huiming Bu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONFORMAL DOPING FOR PUNCH THROUGH STOPPER IN FIN FIELD EFFECT TRAN...
Publication number
20190341457
Publication date
Nov 7, 2019
International Business Machines Corporation
Huiming Bu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURES WITH DEEP TRENCH CAPACITOR AND METHODS OF...
Publication number
20190279987
Publication date
Sep 12, 2019
International Business Machines Corporation
Kevin K. Chan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FINFET WITH REDUCED PARASITIC CAPACITANCE
Publication number
20190259852
Publication date
Aug 22, 2019
International Business Machines Corporation
Emre Alptekin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE MANDRELS IN PATTERNING
Publication number
20190237341
Publication date
Aug 1, 2019
LAM RESEARCH CORPORATION
Jengyi Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELF-ALIGNED PATTERNING METHODS WHICH IMPLEMENT DIRECTED SELF-ASSEMBLY
Publication number
20190221428
Publication date
Jul 18, 2019
International Business Machines Corporation
Sean D. Burns
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LOW UNDERCUT N-P WORK FUNCTION METAL PATTERNING IN NANOSHEET REPLAC...
Publication number
20190214311
Publication date
Jul 11, 2019
International Business Machines Corporation
Indira Seshadri
H01 - BASIC ELECTRIC ELEMENTS