Sivarama Krishnan

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Prasanthi Nilayam, IN

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Patents Grantslast 30 patents

Information Patent Grant
Dual pulse driven extreme ultraviolet (EUV) radiation source method
- Patent number 9,451,684
- Issue date Sep 20, 2016
- International Business Machines Corporation
- Daniel A. Corliss
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Dual pulse driven extreme ultraviolet (EUV) radiation source utiliz...
- Patent number 9,301,381
- Issue date Mar 29, 2016
- International Business Machines Corporation
- Daniel A. Corliss
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
DUAL PULSE DRIVEN EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE
- Publication number 20160205757
- Publication date Jul 14, 2016
- International Business Machines Corporation
- Daniel A. Corliss
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DUAL PULSE DRIVEN EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE UTILIZ...
- Publication number 20160081174
- Publication date Mar 17, 2016
- International Business Machines Corporation
- Daniel A. Corliss
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR