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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Surface coating treatment
Patent number
10,422,028
Issue date
Sep 24, 2019
Lam Research Corporation
Lihua Li Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Optical system and methods for monitoring erosion of electrostatic...
Patent number
7,952,694
Issue date
May 31, 2011
Lam Research Corporation
Bradley J. Howard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrical and optical system and methods for monitoring erosion of...
Patent number
7,884,925
Issue date
Feb 8, 2011
Lam Research Corporation
Bradley J. Howard
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SURFACE COATING TREATMENT
Publication number
20170159164
Publication date
Jun 8, 2017
LAM RESEARCH CORPORATION
Lihua Li HUANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
USE OF SINTERED NANOGRAINED YTTRIUM-BASED CERAMICS AS ETCH CHAMBER...
Publication number
20170018408
Publication date
Jan 19, 2017
LAM RESEARCH CORPORATION
Lin XU
B32 - LAYERED PRODUCTS
Information
Patent Application
Plasma Processing Devices With Corrosion Resistant Components
Publication number
20130160948
Publication date
Jun 27, 2013
LAM RESEARCH CORPORATION
Hong Shih
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
OPTICAL SYSTEM AND METHODS FOR MONITORING EROSION OF ELECTROSTATIC...
Publication number
20110007303
Publication date
Jan 13, 2011
LAM RESEARCH CORPORATION
Bradley J. Howard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRICAL AND OPTICAL SYSTEM AND METHODS FOR MONITORING EROSION OF...
Publication number
20090290145
Publication date
Nov 26, 2009
LAM RESEARCH CORPORATION
Bradley J. Howard
H01 - BASIC ELECTRIC ELEMENTS