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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,339,574
- Issue date Dec 25, 2012
- ASML Netherlands B.V.
- Michael Totzeck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,423,727
- Issue date Sep 9, 2008
- ASML Netherlands B.V.
- Michael Totzeck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20080304037
- Publication date Dec 11, 2008
- ASML NETHERLANDS B.V.
- Michael TOTZECK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060164621
- Publication date Jul 27, 2006
- ASML NETHERLANDS B.V.
- Michael Totzeck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY