Sldlgata V. Sreenivasan

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Adaptive shape substrate support method
- Patent number 7,504,268
- Issue date Mar 17, 2009
- Board of Regents, The University of Texas System
- Mahadevan GanapathiSubramanian
- B82 - NANO-TECHNOLOGY