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Sofiane Soukane
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Etch process for etching microstructures
Patent number
6,936,183
Issue date
Aug 30, 2005
Applied Materials, Inc.
Jeffrey D. Chinn
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dry etch release of MEMS structures
Patent number
6,666,979
Issue date
Dec 23, 2003
Applied Materials, Inc.
Jeffrey D. Chinn
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Dry etch release of MEMS structures
Publication number
20030080082
Publication date
May 1, 2003
Jeffrey D. Chinn
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Etch process for etching microstructures
Publication number
20030071015
Publication date
Apr 17, 2003
APPLIED MATERIALS, INC.
Jeffrey D. Chinn
B81 - MICRO-STRUCTURAL TECHNOLOGY