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Sofiane Soulimane
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Toulouse, FR
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last 30 patents
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Patent Grant
Forming a sacrificial layer in order to realise a suspended element
Patent number
7,851,366
Issue date
Dec 14, 2010
Commissariat a l'Energie Atomique
Fabrice Casset
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
FORMING A SACRIFICIAL LAYER IN ORDER TO REALISE A SUSPENDED ELEMENT
Publication number
20080090421
Publication date
Apr 17, 2008
COMMISSARIAT A L'ENERGIE ATOMIQUE
Fabrice Casset
B81 - MICRO-STRUCTURAL TECHNOLOGY