Sohan Singh MEHTA

Person

Saratoga Springs, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic patterning to form fine pitch features
- Patent number 10,504,774
- Issue date Dec 10, 2019
- GLOBALFOUNDRIES Inc.
- Sunil K. Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Litho-litho-etch double patterning method
- Patent number 10,353,288
- Issue date Jul 16, 2019
- GLOBALFOUNDRIES Inc.
- Vineet Sharma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and devices for back end of line via formation
- Patent number 9,691,654
- Issue date Jun 27, 2017
- GLOBALFOUNDRIES Inc.
- Sunil Kumar Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a semiconductor integrated circuit with a li...
- Patent number 9,171,735
- Issue date Oct 27, 2015
- GLOBALFOUNDRIES, INC.
- Sohan Mehta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Critical dimension and pattern recognition structures for devices m...
- Patent number 8,932,961
- Issue date Jan 13, 2015
- GLOBALFOUNDRIES Inc.
- Sohan Mehta
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LITHO-LITHO-ETCH DOUBLE PATTERNING METHOD
- Publication number 20190163054
- Publication date May 30, 2019
- GLOBALFOUNDRIES INC.
- Vineet Sharma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DUAL DEVELOPING METHODS FOR LITHOGRAPHY PATTERNING
- Publication number 20190079408
- Publication date Mar 14, 2019
- GLOBALFOUNDRIES INC.
- Sohan Singh Mehta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL) REFLECTIVE MASK
- Publication number 20180299765
- Publication date Oct 18, 2018
- GLOBALFOUNDRIES INC.
- SherJang Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LITHOGRAPHIC PATTERNING TO FORM FINE PITCH FEATURES
- Publication number 20180025936
- Publication date Jan 25, 2018
- GLOBALFOUNDRIES INC.
- Sunil K. Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND DEVICES FOR BACK END OF LINE VIA FORMATION
- Publication number 20170178953
- Publication date Jun 22, 2017
- GLOBALFOUNDRIES INC.
- Sunil Kumar SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRITICAL DIMENSION AND PATTERN RECOGNITION STRUCTURES FOR DEVICES M...
- Publication number 20150050811
- Publication date Feb 19, 2015
- GLOBALFOUNDRIES INC.
- Sohan Mehta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING A SEMICONDUCTOR INTEGRATED CIRCUIT WITH A LI...
- Publication number 20140235055
- Publication date Aug 21, 2014
- GLOBALFOUNDRIES, Inc.
- Sohan Mehta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Critical Dimension and Pattern Recognition Structures for Devices M...
- Publication number 20130207108
- Publication date Aug 15, 2013
- GLOBALFOUNDRIES INC.
- Sohan Mehta
- H01 - BASIC ELECTRIC ELEMENTS

Sohan Singh MEHTA

Person

Patents Grantslast 30 patents

Lithographic patterning to form fine pitch features

Litho-litho-etch double patterning method

Methods and devices for back end of line via formation

Method for fabricating a semiconductor integrated circuit with a li...

Critical dimension and pattern recognition structures for devices m...

Patents Applicationslast 30 patents

LITHO-LITHO-ETCH DOUBLE PATTERNING METHOD

DUAL DEVELOPING METHODS FOR LITHOGRAPHY PATTERNING

EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL) REFLECTIVE MASK

LITHOGRAPHIC PATTERNING TO FORM FINE PITCH FEATURES

METHODS AND DEVICES FOR BACK END OF LINE VIA FORMATION

CRITICAL DIMENSION AND PATTERN RECOGNITION STRUCTURES FOR DEVICES M...

METHOD FOR FABRICATING A SEMICONDUCTOR INTEGRATED CIRCUIT WITH A LI...

Critical Dimension and Pattern Recognition Structures for Devices M...