Sohyun Park

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Amorphous carbon deposition method for improved stack defectivity
- Patent number 8,349,741
- Issue date Jan 8, 2013
- Applied Materials, Inc.
- Hang Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous carbon deposition method for improved stack defectivity
- Patent number 8,227,352
- Issue date Jul 24, 2012
- Applied Materials, Inc.
- Hang Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD oxide-nitride and oxide-silicon stacks for 3D memory application
- Patent number 8,076,250
- Issue date Dec 13, 2011
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing an amorphous carbon film with improved densit...
- Patent number 7,867,578
- Issue date Jan 11, 2011
- Applied Materials, Inc.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to deposit functionally graded dielectric films via chemical...
- Patent number 7,802,538
- Issue date Sep 28, 2010
- Applied Materials, Inc.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxide-like seasoning for dielectric low k films
- Patent number 7,700,486
- Issue date Apr 20, 2010
- Applied Materials, Inc.
- Sohyun Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adhesion improvement for low k dielectrics
- Patent number 7,459,404
- Issue date Dec 2, 2008
- Applied Materials, Inc.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to deposit functionally graded dielectric films via chemical...
- Patent number 7,166,544
- Issue date Jan 23, 2007
- Applied Materials, Inc.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxide-like seasoning for dielectric low k films
- Patent number 7,115,508
- Issue date Oct 3, 2006
- Applied Materials, Inc.
- Sohyun Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adhesion improvement for low k dielectrics
- Patent number 7,030,041
- Issue date Apr 18, 2006
- Applied Materials Inc.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
AMORPHOUS CARBON DEPOSITION METHOD FOR IMPROVED STACK DEFECTIVITY
- Publication number 20120208374
- Publication date Aug 16, 2012
- Applied Materials, Inc.
- Hang Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...
- Publication number 20120208373
- Publication date Aug 16, 2012
- Applied Materials, Inc.
- DEENESH PADHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS CARBON DEPOSITION METHOD FOR IMPROVED STACK DEFECTIVITY
- Publication number 20120015521
- Publication date Jan 19, 2012
- Applied Materials, Inc.
- Hang Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...
- Publication number 20110104400
- Publication date May 5, 2011
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...
- Publication number 20080153311
- Publication date Jun 26, 2008
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Overall defect reduction for PECVD films
- Publication number 20080050932
- Publication date Feb 28, 2008
- APPLIED MATERIALS, INC.
- Annamalai Lakshmanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method For Depositing an Amorphous Carbon Film with Improved Densit...
- Publication number 20080003824
- Publication date Jan 3, 2008
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method To Deposit Functionally Graded Dielectric Films Via Chemical...
- Publication number 20070079753
- Publication date Apr 12, 2007
- Applied Materials, Inc.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE-LIKE SEASONING FOR DIELECTRIC LOW K FILMS
- Publication number 20060219175
- Publication date Oct 5, 2006
- Sohyun Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Adhesion improvement for low k dielectrics
- Publication number 20060189162
- Publication date Aug 24, 2006
- APPLIED MATERIALS, INC.
- Lihua Li Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method to deposit functionally graded dielectric films via chemical...
- Publication number 20060046520
- Publication date Mar 2, 2006
- Applied Materials, Inc.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Oxide-like seasoning for dielectric low k films
- Publication number 20050227499
- Publication date Oct 13, 2005
- APPLIED MATERIALS, INC.
- Sohyun Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Adhesion improvement for low k dielectrics
- Publication number 20050202685
- Publication date Sep 15, 2005
- APPLIED MATERIALS, INC.
- Lihua Li Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Sohyun Park

Person

Patents Grantslast 30 patents

Amorphous carbon deposition method for improved stack defectivity

Amorphous carbon deposition method for improved stack defectivity

PECVD oxide-nitride and oxide-silicon stacks for 3D memory application

Method for depositing an amorphous carbon film with improved densit...

Method to deposit functionally graded dielectric films via chemical...

Oxide-like seasoning for dielectric low k films

Adhesion improvement for low k dielectrics

Method to deposit functionally graded dielectric films via chemical...

Oxide-like seasoning for dielectric low k films

Adhesion improvement for low k dielectrics

Patents Applicationslast 30 patents

AMORPHOUS CARBON DEPOSITION METHOD FOR IMPROVED STACK DEFECTIVITY

METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...

AMORPHOUS CARBON DEPOSITION METHOD FOR IMPROVED STACK DEFECTIVITY

METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...

METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...

Overall defect reduction for PECVD films

Method For Depositing an Amorphous Carbon Film with Improved Densit...

Method To Deposit Functionally Graded Dielectric Films Via Chemical...

OXIDE-LIKE SEASONING FOR DIELECTRIC LOW K FILMS

Adhesion improvement for low k dielectrics

Method to deposit functionally graded dielectric films via chemical...

Oxide-like seasoning for dielectric low k films

Adhesion improvement for low k dielectrics