Soichi Isobe

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,541,502
- Issue date Jan 3, 2023
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,688,622
- Issue date Jun 23, 2020
- Ebara Corporation
- Hiroshi Aono
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 9,842,732
- Issue date Dec 12, 2017
- Ebara Corporation
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 9,704,728
- Issue date Jul 11, 2017
- Ebara Corporation
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 9,144,881
- Issue date Sep 29, 2015
- Ebara Corporation
- Hidetaka Nakao
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for dressing a polishing pad, chemical mechanical polishi...
- Patent number 8,382,558
- Issue date Feb 26, 2013
- Ebara Corporation
- Katsuhide Watanabe
- B24 - GRINDING POLISHING
Information Patent Grant
Liquid supply method, liquid supply apparatus, substrate polishing...
- Patent number 8,298,369
- Issue date Oct 30, 2012
- Ebara Corporation
- Koji Maeda
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate delivery mechanism
- Patent number 7,645,185
- Issue date Jan 12, 2010
- Ebara Corporation
- Soichi Isobe
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate delivery mechanism
- Patent number 7,160,180
- Issue date Jan 9, 2007
- Ebara Corporation
- Soichi Isobe
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 7,083,506
- Issue date Aug 1, 2006
- Ebara Corporation
- Hiroomi Torii
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate delivery mechanism
- Patent number 7,063,598
- Issue date Jun 20, 2006
- Ebara Corporation
- Soichi Isobe
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with air exhaust system
- Patent number 6,783,427
- Issue date Aug 31, 2004
- Ebara Corporation
- Soichi Isobe
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,783,445
- Issue date Aug 31, 2004
- Ebara Corporation
- Hiroomi Torii
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 6,746,312
- Issue date Jun 8, 2004
- Ebara Corporation
- Hiroomi Torii
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
LIQUID FEEDER AND POLISHING APPARATUS
- Publication number 20230001539
- Publication date Jan 5, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210394332
- Publication date Dec 23, 2021
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180001440
- Publication date Jan 4, 2018
- EBARA CORPORATION
- Hiroshi AONO
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20170271178
- Publication date Sep 21, 2017
- EBARA CORPORATION
- Koji MAEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS, METHOD FOR ATTACHING POLISHING PAD, AND METHOD...
- Publication number 20150118944
- Publication date Apr 30, 2015
- EBARA CORPORATION
- Ryuichi Kosuge
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20140242885
- Publication date Aug 28, 2014
- Hidetaka Nakao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20140116466
- Publication date May 1, 2014
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER APPARATUS, SUBST...
- Publication number 20120193506
- Publication date Aug 2, 2012
- Nobuyuki Takahashi
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR DRESSING A POLISHING PAD, CHEMICAL MECHANICAL POLISHI...
- Publication number 20100190417
- Publication date Jul 29, 2010
- Katsuhide WATANABE
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing apparatus, substrate transfer apparatus, subst...
- Publication number 20090067959
- Publication date Mar 12, 2009
- Nobuyuki Takahashi
- B24 - GRINDING POLISHING
Information Patent Application
Substrate delivery mechanism
- Publication number 20070264914
- Publication date Nov 15, 2007
- Soichi Isobe
- B24 - GRINDING POLISHING
Information Patent Application
Liquid supply method, liquid supply apparatus, substrate polishing...
- Publication number 20070221615
- Publication date Sep 27, 2007
- Koji Maeda
- B24 - GRINDING POLISHING
Information Patent Application
Substrate delivery mechanism
- Publication number 20070093186
- Publication date Apr 26, 2007
- Soichi Isobe
- B24 - GRINDING POLISHING
Information Patent Application
Substrate delivery mechanism
- Publication number 20060199478
- Publication date Sep 7, 2006
- Soichi Isobe
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus
- Publication number 20040259486
- Publication date Dec 23, 2004
- Hiroomi Torii
- B24 - GRINDING POLISHING
Information Patent Application
Substrate delivery method, a substrate delivery mechanism and a sub...
- Publication number 20030211812
- Publication date Nov 13, 2003
- Soichi Isobe
- B24 - GRINDING POLISHING
Information Patent Application
Polishing system with air exhaust system
- Publication number 20030077989
- Publication date Apr 24, 2003
- Soichi Isobe
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus
- Publication number 20020039880
- Publication date Apr 4, 2002
- Hiroomi Torii
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method and polishing apparatus
- Publication number 20020002028
- Publication date Jan 3, 2002
- Hiroomi Torii
- B24 - GRINDING POLISHING

Soichi Isobe

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Substrate processing apparatus

Substrate cleaning apparatus and substrate cleaning method

Substrate cleaning apparatus and substrate cleaning method

Polishing apparatus and polishing method

Apparatus for dressing a polishing pad, chemical mechanical polishi...

Liquid supply method, liquid supply apparatus, substrate polishing...

Substrate delivery mechanism

Substrate delivery mechanism

Polishing apparatus

Substrate delivery mechanism

Polishing system with air exhaust system

Polishing apparatus

Polishing method and polishing apparatus

Patents Applicationslast 30 patents

LIQUID FEEDER AND POLISHING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

POLISHING APPARATUS, METHOD FOR ATTACHING POLISHING PAD, AND METHOD...

POLISHING APPARATUS AND POLISHING METHOD

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER APPARATUS, SUBST...

APPARATUS FOR DRESSING A POLISHING PAD, CHEMICAL MECHANICAL POLISHI...

Substrate processing apparatus, substrate transfer apparatus, subst...

Substrate delivery mechanism

Liquid supply method, liquid supply apparatus, substrate polishing...

Substrate delivery mechanism

Substrate delivery mechanism

Polishing apparatus

Substrate delivery method, a substrate delivery mechanism and a sub...

Polishing system with air exhaust system

Polishing apparatus

Polishing method and polishing apparatus