Soichi Owa

Person

Kamagaya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Drive method for spatial light modulator, method for generating pat...
- Patent number 11,119,411
- Issue date Sep 14, 2021
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature controlled heat transfer frame for pellicle
- Patent number 10,877,383
- Issue date Dec 29, 2020
- NIKON CORPORATION
- Paul Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical material, optical element and method for manufacturing same
- Patent number 10,768,341
- Issue date Sep 8, 2020
- Nikon Corporation
- Soichi Owa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Spatial light modulator, method of driving same, and exposure metho...
- Patent number 10,761,431
- Issue date Sep 1, 2020
- Nikon Corporation
- Yoji Watanabe
- G02 - OPTICS
Information Patent Grant
Temperature controlled heat transfer frame for pellicle
- Patent number 10,527,956
- Issue date Jan 7, 2020
- Nikon Corporation
- Paul Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spatial light modulator, exposure apparatus, and method for manufac...
- Patent number 10,495,977
- Issue date Dec 3, 2019
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spatial light modulator, method of driving same, and exposure metho...
- Patent number 10,338,479
- Issue date Jul 2, 2019
- Nikon Corporation
- Yoji Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Controller for optical device, exposure method and apparatus, and m...
- Patent number 10,261,421
- Issue date Apr 16, 2019
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spatial light modulator, exposure apparatus, and method for manufac...
- Patent number 10,222,705
- Issue date Mar 5, 2019
- Nikon Corporation
- Soichi Owa
- G02 - OPTICS
Information Patent Grant
Spatial light modulator, method of driving same, and exposure metho...
- Patent number 10,054,858
- Issue date Aug 21, 2018
- Nikon Corporation
- Yoji Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 10,048,602
- Issue date Aug 14, 2018
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical material, optical element, and method for manufacturing same
- Patent number 10,012,768
- Issue date Jul 3, 2018
- Nikon Corporation
- Soichi Owa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Controller for optical device, exposure method and apparatus, and m...
- Patent number 9,946,162
- Issue date Apr 17, 2018
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,846,371
- Issue date Dec 19, 2017
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spatial light modulator, exposure apparatus, and method for manufac...
- Patent number 9,651,871
- Issue date May 16, 2017
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Controller for optical device, exposure method and apparatus, and m...
- Patent number 9,551,942
- Issue date Jan 24, 2017
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 9,316,921
- Issue date Apr 19, 2016
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical material, optical element, and method for manufacturing same
- Patent number 9,310,520
- Issue date Apr 12, 2016
- Nikon Corporation
- Soichi Owa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Spatial light modulator, exposure apparatus, and method for manufac...
- Patent number 9,291,814
- Issue date Mar 22, 2016
- Nikon Corporation
- Soichi Owa
- G02 - OPTICS
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,268,237
- Issue date Feb 23, 2016
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Controller for optical device, exposure method and apparatus, and m...
- Patent number 9,268,235
- Issue date Feb 23, 2016
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming method and apparatus, exposure method and apparatus...
- Patent number 9,239,525
- Issue date Jan 19, 2016
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,235,139
- Issue date Jan 12, 2016
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 9,063,436
- Issue date Jun 23, 2015
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,019,467
- Issue date Apr 28, 2015
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Template manufacturing method, template inspecting method and inspe...
- Patent number 8,807,978
- Issue date Aug 19, 2014
- Nikon Corporation
- Soichi Owa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, method for cleaning member thereof, maintenance...
- Patent number 8,810,767
- Issue date Aug 19, 2014
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming method and method for producing device
- Patent number 8,795,953
- Issue date Aug 5, 2014
- Nikon Corporation
- Toshikazu Umatate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Controller for optical device, exposure method and apparatus, and m...
- Patent number 8,792,081
- Issue date Jul 29, 2014
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,780,327
- Issue date Jul 15, 2014
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT, METHOD F...
- Publication number 20240152053
- Publication date May 9, 2024
- Nikon Corporation
- Yuho KANAYA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPERATURE CONTROLLED HEAT TRANSFER FRAME FOR PELLICLE
- Publication number 20200089134
- Publication date Mar 19, 2020
- Nikon Corporation
- Paul Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPATIAL LIGHT MODULATOR, METHOD OF DRIVING SAME, AND EXPOSURE METHO...
- Publication number 20190271917
- Publication date Sep 5, 2019
- Nikon Corporation
- Yoji WATANABE
- G02 - OPTICS
Information Patent Application
SPATIAL LIGHT MODULATOR, EXPOSURE APPARATUS, AND METHOD FOR MANUFAC...
- Publication number 20190146354
- Publication date May 16, 2019
- Nikon Corporation
- Soichi Owa
- G02 - OPTICS
Information Patent Application
SPATIAL LIGHT MODULATOR, METHOD OF DRIVING SAME, AND EXPOSURE METHO...
- Publication number 20190049857
- Publication date Feb 14, 2019
- Nikon Corporation
- Yoji WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20180348653
- Publication date Dec 6, 2018
- Nikon Corporation
- Naoyuki KOBAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL MATERIAL, OPTICAL ELEMENT AND METHOD FOR MANUFACTURING SAME
- Publication number 20180284324
- Publication date Oct 4, 2018
- Nikon Corporation
- Soichi OWA
- B82 - NANO-TECHNOLOGY
Information Patent Application
TEMPERATURE CONTROLLED HEAT TRANSFER FRAME FOR PELLICLE
- Publication number 20180275534
- Publication date Sep 27, 2018
- Nikon Corporation
- Paul Derek Coon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROLLER FOR OPTICAL DEVICE, EXPOSURE METHOD AND APPARATUS, AND M...
- Publication number 20180203363
- Publication date Jul 19, 2018
- NIKON CORPORATION
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20170329234
- Publication date Nov 16, 2017
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPATIAL LIGHT MODULATOR, EXPOSURE APPARATUS, AND METHOD FOR MANUFAC...
- Publication number 20170219931
- Publication date Aug 3, 2017
- Nikon Corporation
- Soichi Owa
- G02 - OPTICS
Information Patent Application
CONTROLLER FOR OPTICAL DEVICE, EXPOSURE METHOD AND APPARATUS, AND M...
- Publication number 20170090300
- Publication date Mar 30, 2017
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20160252828
- Publication date Sep 1, 2016
- Nikon Corporation
- Naoyuki KOBAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPATIAL LIGHT MODULATOR, EXPOSURE APPARATUS, AND METHOD FOR MANUFAC...
- Publication number 20160223914
- Publication date Aug 4, 2016
- Nikon Corporation
- Soichi Owa
- G02 - OPTICS
Information Patent Application
OPTICAL MATERIAL, OPTICAL ELEMENT, AND METHOD FOR MANUFACTURING SAME
- Publication number 20160195640
- Publication date Jul 7, 2016
- Nikon Corporation
- Soichi OWA
- G02 - OPTICS
Information Patent Application
CONTROLLER FOR OPTICAL DEVICE, EXPOSURE METHOD AND APPARATUS, AND M...
- Publication number 20160124314
- Publication date May 5, 2016
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20150301457
- Publication date Oct 22, 2015
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRIVE METHOD FOR SPATIAL LIGHT MODULATOR, METHOD FOR GENERATING PAT...
- Publication number 20150077732
- Publication date Mar 19, 2015
- Nikon Corporation
- Soichi Owa
- G02 - OPTICS
Information Patent Application
CONTROLLER FOR OPTICAL DEVICE, EXPOSURE METHOD AND APPARATUS, AND M...
- Publication number 20140313501
- Publication date Oct 23, 2014
- NIKON CORPORATION
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20140055763
- Publication date Feb 27, 2014
- Nikon Corporation
- Naoyuki KOBAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPATIAL LIGHT MODULATOR, METHOD OF DRIVING SAME, AND EXPOSURE METHO...
- Publication number 20130314683
- Publication date Nov 28, 2013
- Yoji Watanabe
- G02 - OPTICS
Information Patent Application
SPATIAL LIGHT MODULATOR, EXPOSURE APPARATUS, AND METHOD FOR MANUFAC...
- Publication number 20130278912
- Publication date Oct 24, 2013
- Nikon Corporation
- Soichi Owa
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20130169945
- Publication date Jul 4, 2013
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20130141703
- Publication date Jun 6, 2013
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20130141701
- Publication date Jun 6, 2013
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20120224154
- Publication date Sep 6, 2012
- Nikon Corporation
- Naoyuki KOBAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING METHOD AND METHOD FOR PRODUCING DEVICE
- Publication number 20120225388
- Publication date Sep 6, 2012
- Nikon Corporation
- Toshikazu UMATATE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20120176589
- Publication date Jul 12, 2012
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL MATERIAL, OPTICAL ELEMENT, AND METHOD FOR MANUFACTURING SAME
- Publication number 20120088078
- Publication date Apr 12, 2012
- Nikon Corporation
- Soichi OWA
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20120062861
- Publication date Mar 15, 2012
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Person

Patents Grantslast 30 patents

Drive method for spatial light modulator, method for generating pat...

Temperature controlled heat transfer frame for pellicle

Optical material, optical element and method for manufacturing same

Spatial light modulator, method of driving same, and exposure metho...

Temperature controlled heat transfer frame for pellicle

Spatial light modulator, exposure apparatus, and method for manufac...

Spatial light modulator, method of driving same, and exposure metho...

Controller for optical device, exposure method and apparatus, and m...

Spatial light modulator, exposure apparatus, and method for manufac...

Spatial light modulator, method of driving same, and exposure metho...

Exposure apparatus, exposure method, and method for producing device

Optical material, optical element, and method for manufacturing same

Controller for optical device, exposure method and apparatus, and m...

Exposure method, substrate stage, exposure apparatus, and device ma...

Spatial light modulator, exposure apparatus, and method for manufac...

Controller for optical device, exposure method and apparatus, and m...

Exposure apparatus, exposure method, and method for producing device

Optical material, optical element, and method for manufacturing same

Spatial light modulator, exposure apparatus, and method for manufac...

Exposure method, substrate stage, exposure apparatus, and device ma...

Controller for optical device, exposure method and apparatus, and m...

Pattern forming method and apparatus, exposure method and apparatus...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure apparatus, exposure method, and method for producing device

Exposure method, substrate stage, exposure apparatus, and device ma...

Template manufacturing method, template inspecting method and inspe...

Exposure apparatus, method for cleaning member thereof, maintenance...

Pattern forming method and method for producing device

Controller for optical device, exposure method and apparatus, and m...

Exposure apparatus and method for producing device

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT, METHOD F...

TEMPERATURE CONTROLLED HEAT TRANSFER FRAME FOR PELLICLE

SPATIAL LIGHT MODULATOR, METHOD OF DRIVING SAME, AND EXPOSURE METHO...

SPATIAL LIGHT MODULATOR, EXPOSURE APPARATUS, AND METHOD FOR MANUFAC...

SPATIAL LIGHT MODULATOR, METHOD OF DRIVING SAME, AND EXPOSURE METHO...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

OPTICAL MATERIAL, OPTICAL ELEMENT AND METHOD FOR MANUFACTURING SAME

TEMPERATURE CONTROLLED HEAT TRANSFER FRAME FOR PELLICLE

CONTROLLER FOR OPTICAL DEVICE, EXPOSURE METHOD AND APPARATUS, AND M...

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

SPATIAL LIGHT MODULATOR, EXPOSURE APPARATUS, AND METHOD FOR MANUFAC...

CONTROLLER FOR OPTICAL DEVICE, EXPOSURE METHOD AND APPARATUS, AND M...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

SPATIAL LIGHT MODULATOR, EXPOSURE APPARATUS, AND METHOD FOR MANUFAC...

OPTICAL MATERIAL, OPTICAL ELEMENT, AND METHOD FOR MANUFACTURING SAME

CONTROLLER FOR OPTICAL DEVICE, EXPOSURE METHOD AND APPARATUS, AND M...

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

DRIVE METHOD FOR SPATIAL LIGHT MODULATOR, METHOD FOR GENERATING PAT...

CONTROLLER FOR OPTICAL DEVICE, EXPOSURE METHOD AND APPARATUS, AND M...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

SPATIAL LIGHT MODULATOR, METHOD OF DRIVING SAME, AND EXPOSURE METHO...

SPATIAL LIGHT MODULATOR, EXPOSURE APPARATUS, AND METHOD FOR MANUFAC...

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

PATTERN FORMING METHOD AND METHOD FOR PRODUCING DEVICE

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

OPTICAL MATERIAL, OPTICAL ELEMENT, AND METHOD FOR MANUFACTURING SAME

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD