Soichi Shida

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Pattern inspection apparatus and method
- Patent number 8,809,778
- Issue date Aug 19, 2014
- Advantest Corp.
- Ryuichi Ogino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope with length measurement function and d...
- Patent number 7,791,022
- Issue date Sep 7, 2010
- Advantest Corp.
- Takayuki Nakamura
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus detecting an IC defect by comparing electron emissions fr...
- Patent number 5,821,761
- Issue date Oct 13, 1998
- Advantest Corporation
- Soichi Shida
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detecting an IC defect using charged parti...
- Patent number 5,757,198
- Issue date May 26, 1998
- Advantest Corporation
- Soichi Shida
- G01 - MEASURING TESTING
Information Patent Grant
Method for detecting an IC defect using charged particle beam
- Patent number 5,592,100
- Issue date Jan 7, 1997
- Advantest Corporation
- Soichi Shida
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detecting an IC defect using a charged par...
- Patent number 5,521,517
- Issue date May 28, 1996
- Advantest Corporation
- Soichi Shida
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PATTERN INSPECTION APPARATUS AND METHOD
- Publication number 20130234020
- Publication date Sep 12, 2013
- Ryuichi Ogino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning electron microscope with length measurement function and d...
- Publication number 20080224039
- Publication date Sep 18, 2008
- Takayuki Nakamura
- G01 - MEASURING TESTING