Soichi Toorisawa

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Hinodemachi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for automatically inspecting and correcting masks
- Patent number 4,148,065
- Issue date Apr 3, 1979
- Hitachi, Ltd.
- Kiyoshi Nakagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY