Soichiro KIMURA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 10,957,515
- Issue date Mar 23, 2021
- Tokyo Electron Limited
- Masanori Hosoya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method
- Patent number 9,805,945
- Issue date Oct 31, 2017
- Tokyo Electron Limited
- Akira Hidaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20180233331
- Publication date Aug 16, 2018
- TOKYO ELECTRON LIMITED
- Masanori HOSOYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD
- Publication number 20160379841
- Publication date Dec 29, 2016
- TOKYO ELECTRON LIMITED
- Akira HIDAKA
- H01 - BASIC ELECTRIC ELEMENTS