Soichiro Mitsui

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cover and charged particle beam writing method using same
- Patent number 8,779,397
- Issue date Jul 15, 2014
- Nuflare Technology, Inc.
- Michihiro Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of generating writing pattern data of mask and method of wri...
- Patent number 7,704,645
- Issue date Apr 27, 2010
- Kabushiki Kaisha Toshiba
- Soichiro Mitsui
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Position detecting apparatus and position detecting method
- Patent number 7,495,248
- Issue date Feb 24, 2009
- Kabushiki Kaisha Toshiba
- Soichiro Mitsui
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus
- Patent number 7,491,959
- Issue date Feb 17, 2009
- Kabushiki Kaisha Toshiba
- Riki Ogawa
- G01 - MEASURING TESTING
Information Patent Grant
Alignment method
- Patent number 7,075,621
- Issue date Jul 11, 2006
- Kabushiki Kaisha Toshiba
- Soichiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment apparatus for substrates
- Patent number 6,901,314
- Issue date May 31, 2005
- Kabushiki Kaisha Toshiba
- Soichiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray lithography system and x-ray lithography method
- Patent number 6,078,641
- Issue date Jun 20, 2000
- Kabushiki Kaisha Toshiba
- Soichiro Mitsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE COVER AND CHARGED PARTICLE BEAM WRITING METHOD USING SAME
- Publication number 20110155930
- Publication date Jun 30, 2011
- NuFlare Technology, Inc.
- Michihiro KAWAGUCHI
- B82 - NANO-TECHNOLOGY
Information Patent Application
POSITION DETECTING APPARATUS AND POSITION DETECTING METHOD
- Publication number 20080203334
- Publication date Aug 28, 2008
- Kabushiki Kaisha Toshiba
- Soichiro MITSUI
- G01 - MEASURING TESTING
Information Patent Application
Defect inspection apparatus
- Publication number 20070070334
- Publication date Mar 29, 2007
- Riki Ogawa
- G01 - MEASURING TESTING
Information Patent Application
Mask blank and process for producing and process for using the same...
- Publication number 20060240335
- Publication date Oct 26, 2006
- Soichiro Mitsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of generating writing pattern data of mask and method of wri...
- Publication number 20050214657
- Publication date Sep 29, 2005
- Kabushiki Kaisha Toshiba
- Soichiro Mitsui
- B82 - NANO-TECHNOLOGY
Information Patent Application
Alignment method
- Publication number 20050128451
- Publication date Jun 16, 2005
- Soichiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Alignment apparatus for substrates
- Publication number 20030185664
- Publication date Oct 2, 2003
- Soichiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS