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Sok Kiow Tan
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Newark, CA, US
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last 30 patents
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Patent Grant
Tungsten silicide etch process with reduced etch rate micro-loading
Patent number
7,413,992
Issue date
Aug 19, 2008
Lam Research Corporation
Sok Kiow Tan
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Tungsten silicide etch process with reduced etch rate micro-loading
Publication number
20060273072
Publication date
Dec 7, 2006
LAM RESEARCH CORPORATION
Sok Kiow Tan
H01 - BASIC ELECTRIC ELEMENTS