Sommawan KHUMPUANG

Person

  • Tsukuba-shi, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLATING MACHINE WITH TREATMENT UNITS ARRANGED ON CIRCUMFERENCE

    • Publication number 20220341053
    • Publication date Oct 27, 2022
    • NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    • Shiro HARA
    • C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
  • Information Patent Application

    ENCAPSULATED CLEANROOM SYSTEM

    • Publication number 20210302034
    • Publication date Sep 30, 2021
    • NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    • Shiro HARA
    • F24 - HEATING RANGES VENTILATING
  • Information Patent Application

    METHOD OF MANUFACTURING SEMICONDUCTOR PACKAGE USING ALIGNMENT MARK...

    • Publication number 20200266119
    • Publication date Aug 20, 2020
    • NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    • Shiro HARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SURFACE MOUNT PACKAGE AND MANUFACTURING METHOD THEREOF

    • Publication number 20180025994
    • Publication date Jan 25, 2018
    • National Institute of Advanced Industrial Science and Technology
    • Shiro HARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TREATMENT LIQUID SUPPLY DEVICE USING SYRINGE, AND WET TREATMENT DEVICE

    • Publication number 20180001354
    • Publication date Jan 4, 2018
    • NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    • Shiro HARA
    • B08 - CLEANING
  • Information Patent Application

    CIRCULAR SUPPORT SUBSTRATE FOR SEMICONDUCTOR

    • Publication number 20170352570
    • Publication date Dec 7, 2017
    • National Institute of Advanced Industrial Science and Technology
    • Shiro HARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SYSTEM FOR INTEGRATING PRECEDING STEPS AND SUBSEQUENT STEPS

    • Publication number 20170330741
    • Publication date Nov 16, 2017
    • NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    • Michihiro INOUE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING DEVICE

    • Publication number 20170098557
    • Publication date Apr 6, 2017
    • NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    • Yoshiki SHIMIZU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    COLUMNAR LAMINAR FLOW GENERATION DEVICE AND METHOD FOR GENERATING C...

    • Publication number 20170072438
    • Publication date Mar 16, 2017
    • NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    • Shuuji OKUDA
    • B08 - CLEANING
  • Information Patent Application

    WET PROCESSING APPARATUS

    • Publication number 20160293401
    • Publication date Oct 6, 2016
    • NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    • Shiro HARA
    • B08 - CLEANING
  • Information Patent Application

    PROCESS SUBSTRATE WITH CRYSTAL ORIENTATION MARK, METHOD OF DETECTIN...

    • Publication number 20160211218
    • Publication date Jul 21, 2016
    • NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    • Shiro HARA
    • G01 - MEASURING TESTING
  • Information Patent Application

    Spin Development Method and Apparatus

    • Publication number 20150050602
    • Publication date Feb 19, 2015
    • National Institute of Advanced Industrial Science and Technology
    • Sommawan Khumpuang
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    CONVERGING MIRROR FURNACE

    • Publication number 20140338591
    • Publication date Nov 20, 2014
    • National Institute of Advanced Industrial Science and Technology
    • Shinichi Ikeda
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    Exposure Apparatus and Exposure Method

    • Publication number 20140320840
    • Publication date Oct 30, 2014
    • National Institute of Advanced Industrial Science and Technology
    • Shiro Hara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF MANUFACTURING SEMICONDUCTOR WAFERS

    • Publication number 20140154870
    • Publication date Jun 5, 2014
    • NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    • Yoshio NAKAMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER POLISHING APPARATUS

    • Publication number 20140154958
    • Publication date Jun 5, 2014
    • NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    • Yoshio NAKAMURA
    • B24 - GRINDING POLISHING