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Sommawan KHUMPUANG
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Tsukuba-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Encapsulated cleanroom system
Patent number
11,686,479
Issue date
Jun 27, 2023
National Institute of Advanced Industrial Science and Technology
Shiro Hara
F24 - HEATING RANGES VENTILATING
Information
Patent Grant
Method of manufacturing semiconductor package using alignment mark...
Patent number
11,056,410
Issue date
Jul 6, 2021
National Institute of Advanced Industrial Science and Technology
Shiro Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Treatment liquid supply device using syringe, and wet treatment device
Patent number
10,478,867
Issue date
Nov 19, 2019
National Institute of Advanced Industrial Science and Technology
Shiro Hara
B08 - CLEANING
Information
Patent Grant
Wet processing apparatus
Patent number
10,431,446
Issue date
Oct 1, 2019
National Institute of Advanced Industrial Science and Technology
Shiro Hara
B08 - CLEANING
Information
Patent Grant
System for integrating preceding steps and subsequent steps
Patent number
10,304,675
Issue date
May 28, 2019
National Institute of Advanced Industrial Science and Technology
Michihiro Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Columnar laminar flow generation device and method for generating c...
Patent number
10,286,426
Issue date
May 14, 2019
National Institute of Advanced Industrial Science and Technology
Shuuji Okuda
B08 - CLEANING
Information
Patent Grant
Process substrate with crystal orientation mark, method of detectin...
Patent number
10,186,489
Issue date
Jan 22, 2019
National Institute of Advanced Industrial Science and Technology
Shiro Hara
G01 - MEASURING TESTING
Information
Patent Grant
Circular support substrate for semiconductor
Patent number
10,163,674
Issue date
Dec 25, 2018
National Institute of Advanced Industrial Science and Technology
Shiro Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Surface mount package and manufacturing method thereof
Patent number
10,163,819
Issue date
Dec 25, 2018
National Institute of Advanced Industrial Science and Technology
Shiro Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Converging mirror furnace
Patent number
9,777,375
Issue date
Oct 3, 2017
National Institute of Advanced Industrial Science and Technology
Shinichi Ikeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Exposure apparatus and exposure method
Patent number
9,513,567
Issue date
Dec 6, 2016
National Institute of Advanced Industrial Science and Technology
Shiro Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing semiconductor wafers
Patent number
9,123,795
Issue date
Sep 1, 2015
Fujikoshi Machinery Corp.
Yoshio Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer polishing apparatus
Patent number
9,017,146
Issue date
Apr 28, 2015
Fujikoshi Machinery Corp.
Yoshio Nakamura
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
PLATING MACHINE WITH TREATMENT UNITS ARRANGED ON CIRCUMFERENCE
Publication number
20220341053
Publication date
Oct 27, 2022
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Shiro HARA
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
ENCAPSULATED CLEANROOM SYSTEM
Publication number
20210302034
Publication date
Sep 30, 2021
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Shiro HARA
F24 - HEATING RANGES VENTILATING
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR PACKAGE USING ALIGNMENT MARK...
Publication number
20200266119
Publication date
Aug 20, 2020
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Shiro HARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE MOUNT PACKAGE AND MANUFACTURING METHOD THEREOF
Publication number
20180025994
Publication date
Jan 25, 2018
National Institute of Advanced Industrial Science and Technology
Shiro HARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TREATMENT LIQUID SUPPLY DEVICE USING SYRINGE, AND WET TREATMENT DEVICE
Publication number
20180001354
Publication date
Jan 4, 2018
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Shiro HARA
B08 - CLEANING
Information
Patent Application
CIRCULAR SUPPORT SUBSTRATE FOR SEMICONDUCTOR
Publication number
20170352570
Publication date
Dec 7, 2017
National Institute of Advanced Industrial Science and Technology
Shiro HARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM FOR INTEGRATING PRECEDING STEPS AND SUBSEQUENT STEPS
Publication number
20170330741
Publication date
Nov 16, 2017
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Michihiro INOUE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING DEVICE
Publication number
20170098557
Publication date
Apr 6, 2017
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Yoshiki SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COLUMNAR LAMINAR FLOW GENERATION DEVICE AND METHOD FOR GENERATING C...
Publication number
20170072438
Publication date
Mar 16, 2017
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Shuuji OKUDA
B08 - CLEANING
Information
Patent Application
WET PROCESSING APPARATUS
Publication number
20160293401
Publication date
Oct 6, 2016
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Shiro HARA
B08 - CLEANING
Information
Patent Application
PROCESS SUBSTRATE WITH CRYSTAL ORIENTATION MARK, METHOD OF DETECTIN...
Publication number
20160211218
Publication date
Jul 21, 2016
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Shiro HARA
G01 - MEASURING TESTING
Information
Patent Application
Spin Development Method and Apparatus
Publication number
20150050602
Publication date
Feb 19, 2015
National Institute of Advanced Industrial Science and Technology
Sommawan Khumpuang
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
CONVERGING MIRROR FURNACE
Publication number
20140338591
Publication date
Nov 20, 2014
National Institute of Advanced Industrial Science and Technology
Shinichi Ikeda
C30 - CRYSTAL GROWTH
Information
Patent Application
Exposure Apparatus and Exposure Method
Publication number
20140320840
Publication date
Oct 30, 2014
National Institute of Advanced Industrial Science and Technology
Shiro Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR WAFERS
Publication number
20140154870
Publication date
Jun 5, 2014
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Yoshio NAKAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER POLISHING APPARATUS
Publication number
20140154958
Publication date
Jun 5, 2014
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Yoshio NAKAMURA
B24 - GRINDING POLISHING