Son T. CHAU

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Lynn, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Enhanced high aspect ratio etch performance using accelerated neutr...
- Patent number 10,670,960
- Issue date Jun 2, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Film and methods of forming same
- Patent number 10,539,867
- Issue date Jan 21, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
USING ANAB TECHNOLOGY TO REMOVE PRODUCTION PROCESSING RESIDUALS FRO...
- Publication number 20240018003
- Publication date Jan 18, 2024
- Exogenesis Corporation
- Sean R. Kirkpatrick
- C01 - INORGANIC CHEMISTRY
Information Patent Application
FILM AND METHODS OF FORMING SAME
- Publication number 20200387065
- Publication date Dec 10, 2020
- Exogenesis Corporation
- Sean R. Kirkpatrick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR DIRECTING A NEUTRAL BEAM
- Publication number 20200022247
- Publication date Jan 16, 2020
- Sean R. Kirkpatrick
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ENHANCED HIGH ASPECT RATIO ETCH PERFORMANCE USING ACCELERATED NEUTR...
- Publication number 20180292745
- Publication date Oct 11, 2018
- Exogenesis Corporation
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Application
FILM AND METHODS OF FORMING SAME
- Publication number 20160091787
- Publication date Mar 31, 2016
- Exogenesis Corporation
- Sean R. Kirkpatrick
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD AND APPARATUS FOR DIRECTING A NEUTRAL BEAM
- Publication number 20150366044
- Publication date Dec 17, 2015
- Exogenesis Corporation
- Sean R. KIRKPATRICK
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR