Son Trinh

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for removing oxides
- Patent number 8,846,163
- Issue date Sep 30, 2014
- Applied Materials, Inc.
- Chien-Teh Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for front end of line fabrication
- Patent number 7,767,024
- Issue date Aug 3, 2010
- Appplied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lid assembly for front end of line fabrication
- Patent number 7,520,957
- Issue date Apr 21, 2009
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for front end of line fabrication
- Patent number 7,396,480
- Issue date Jul 8, 2008
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for sealing electrical contacts during an elec...
- Patent number 7,067,045
- Issue date Jun 27, 2006
- Applied Materials, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Plating uniformity control by contact ring shaping
- Patent number 7,025,862
- Issue date Apr 11, 2006
- Applied Materials
- Harald Herchen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonant chamber applicator for remote plasma source
- Patent number 6,603,269
- Issue date Aug 5, 2003
- Applied Materials, Inc.
- Be Van Vo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead with reduced contact area
- Patent number 6,461,435
- Issue date Oct 8, 2002
- Applied Materials, Inc.
- Karl A. Littau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for preventing edge deposition
- Patent number 6,375,748
- Issue date Apr 23, 2002
- Applied Materials, Inc.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber design for modular manufacturing and flexible onsite servicing
- Patent number 6,277,199
- Issue date Aug 21, 2001
- Applied Materials, Inc.
- Lawrence Chung-Lai Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pivoting lid assembly for a chamber
- Patent number 6,050,446
- Issue date Apr 18, 2000
- Applied Materials, Inc.
- Lawrence Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat exchange passage connection
- Patent number 5,968,276
- Issue date Oct 19, 1999
- Applied Materials, Inc.
- Lawrence Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MULTI CHAMBER PROCESSING SYSTEM
- Publication number 20140076234
- Publication date Mar 20, 2014
- Applied Materials, Inc.
- Chien-Teh KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REMOVING OXIDES
- Publication number 20120244704
- Publication date Sep 27, 2012
- CHIEN-TEH KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REMOVING OXIDES
- Publication number 20110223755
- Publication date Sep 15, 2011
- CHIEN-TEH KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REMOVING OXIDES
- Publication number 20090111280
- Publication date Apr 30, 2009
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FRONT END OF LINE FABRICATION
- Publication number 20080268645
- Publication date Oct 30, 2008
- CHIEN-TEH KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In-situ dry clean chamber for front end of line fabrication
- Publication number 20050230350
- Publication date Oct 20, 2005
- APPLIED MATERIALS, INC.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Lid assembly for front end of line fabrication
- Publication number 20050218507
- Publication date Oct 6, 2005
- APPLIED MATERIALS, INC.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate support for in-situ dry clean chamber for front end of li...
- Publication number 20050221552
- Publication date Oct 6, 2005
- APPLIED MATERIALS, INC.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for front end of line fabrication
- Publication number 20050205110
- Publication date Sep 22, 2005
- APPLIED MATERIALS, INC.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for sealing electrical contacts during an elec...
- Publication number 20040074762
- Publication date Apr 22, 2004
- APPLIED MATERIALS, INC.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Plating uniformity control by contact ring shaping
- Publication number 20040074761
- Publication date Apr 22, 2004
- APPLIED MATERIALS, INC.
- Harald Herchen
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Oxide treatment and pressure control for electrodeposition
- Publication number 20040069651
- Publication date Apr 15, 2004
- APPLIED MATERIALS, INC.
- Harald Herchen
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Processing chamber with multi-layer brazed lid
- Publication number 20020072164
- Publication date Jun 13, 2002
- Applied Materials, Inc.
- Sal Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Method for removing oxides

Method for front end of line fabrication

Lid assembly for front end of line fabrication

Method for front end of line fabrication

Method and apparatus for sealing electrical contacts during an elec...

Plating uniformity control by contact ring shaping

Resonant chamber applicator for remote plasma source

Showerhead with reduced contact area

Method and apparatus for preventing edge deposition

Chamber design for modular manufacturing and flexible onsite servicing

Pivoting lid assembly for a chamber

Heat exchange passage connection

Patents Applicationslast 30 patents

MULTI CHAMBER PROCESSING SYSTEM

METHOD FOR REMOVING OXIDES

METHOD FOR REMOVING OXIDES

METHOD FOR REMOVING OXIDES

METHOD FOR FRONT END OF LINE FABRICATION

In-situ dry clean chamber for front end of line fabrication

Lid assembly for front end of line fabrication

Substrate support for in-situ dry clean chamber for front end of li...

Method for front end of line fabrication

Method and apparatus for sealing electrical contacts during an elec...

Plating uniformity control by contact ring shaping

Oxide treatment and pressure control for electrodeposition

Processing chamber with multi-layer brazed lid