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Patents Grants
last 30 patents
Information
Patent Grant
Method for detecting overlay precision and method for compensating...
Patent number
11,988,968
Issue date
May 21, 2024
Semiconductor Manufacturing International (Shanghai) Corporation
Song Bai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of manufacturing a semiconductor structure by forming a mask...
Patent number
11,587,836
Issue date
Feb 21, 2023
Semiconductor Manufacturing International (Shanghai) Corporation
Song Bai
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR DETECTING OVERLAY PRECISION AND METHOD FOR COMPENSATING...
Publication number
20210208514
Publication date
Jul 8, 2021
Semiconductor Manufacturing International (Shanghai) Corporation
Song BAI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF
Publication number
20210090960
Publication date
Mar 25, 2021
Semiconductor Manufacturing International (Shanghai) Corporation
Song BAI
H01 - BASIC ELECTRIC ELEMENTS