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Song Hwan Park
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Chungcheongnam-do, KR
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus
Patent number
10,392,702
Issue date
Aug 27, 2019
Eugene Technology Co., Ltd.
Woo Duck Jung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing device equipped with semicircle shaped antenna
Patent number
9,416,451
Issue date
Aug 16, 2016
EUGENE TECHNOLOGY CO., LTD.
Sung Tae Je
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20180122638
Publication date
May 3, 2018
EUGENE TECHNOLOGY CO., LTD.
Woo Duck JUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20170025293
Publication date
Jan 26, 2017
EUGENE TECHNOLOGY CO., LTD.
Woo Duck JUNG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING DEVICE FOR SUPPLYING REACTION GAS THROUGH SYMM...
Publication number
20130186337
Publication date
Jul 25, 2013
EUGENE TECHNOLOGY CO., LTD.
Sung Tae Je
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING DEVICE EQUIPPED WITH SEMICIRCLE SHAPED ANTENNA
Publication number
20130180453
Publication date
Jul 18, 2013
EUGENE TECHNOLOGY CO., LTD.
Sung Tae Je
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...