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last 30 patents
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Patent Grant
Substrate-topography-aware lithography modeling
Patent number
8,918,744
Issue date
Dec 23, 2014
ASML Netherlands B.V.
Song Lan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Calibration pattern selection based on noise sensitivity
Patent number
8,887,105
Issue date
Nov 11, 2014
ASML Netherlands B.V.
Antoine Jean Bruguier
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE-TOPOGRAPHY-AWARE LITHOGRAPHY MODELING
Publication number
20130205263
Publication date
Aug 8, 2013
ASML NETHERLANDS B.V.
Song LAN
G06 - COMPUTING CALCULATING COUNTING