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Patents Grants
last 30 patents
Information
Patent Grant
Method for processing substrate, processing apparatus, and processi...
Patent number
11,832,524
Issue date
Nov 28, 2023
Tokyo Electron Limited
Takuya Kubo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of processing workpiece
Patent number
11,171,286
Issue date
Nov 9, 2021
Tokyo Electron Limited
Takuya Kubo
G11 - INFORMATION STORAGE
Information
Patent Grant
Substrate manufacturing method and processing system
Patent number
11,152,564
Issue date
Oct 19, 2021
Tokyo Electron Limited
Takuya Kubo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning a substrate processing apparatus and the substra...
Patent number
10,944,051
Issue date
Mar 9, 2021
Tokyo Electron Limited
Takuya Kubo
G11 - INFORMATION STORAGE
Information
Patent Grant
Method for etching multilayer film
Patent number
10,790,152
Issue date
Sep 29, 2020
Tokyo Electron Limited
Takuya Kubo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning and method of plasma processing
Patent number
10,403,814
Issue date
Sep 3, 2019
Tokyo Electron Limited
Takuya Kubo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
10,181,559
Issue date
Jan 15, 2019
Tokyo Electron Limited
Takuya Kubo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching object to be processed
Patent number
9,947,864
Issue date
Apr 17, 2018
Tokyo Electron Limited
Tamotsu Morimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
ZnO film production system and production method using ZnO film pro...
Patent number
9,611,545
Issue date
Apr 4, 2017
Tokyo Electron Limited
Song yun Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Starting material for use in forming silicon oxide film and method...
Patent number
8,753,988
Issue date
Jun 17, 2014
Tokyo Electron Limited
Song Yun Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
RLSA CVD deposition control using halogen gas for hydrogen scavenging
Patent number
7,763,551
Issue date
Jul 27, 2010
Tokyo Electron Limited
Jozef Brcka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electron beam processing method and apparatus
Patent number
7,348,129
Issue date
Mar 25, 2008
Tokyo Electron Limited
Kazuyuki Mitsuoka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE WITH OXIDE SEMICONDUCTO...
Publication number
20230371242
Publication date
Nov 16, 2023
TOKYO ELECTRON LIMITED
Song yun KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PROCESSING SUBSTRATE, PROCESSING APPARATUS, AND PROCESSI...
Publication number
20220115589
Publication date
Apr 14, 2022
TOKYO ELECTRON LIMITED
Takuya KUBO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20210305066
Publication date
Sep 30, 2021
TOKYO ELECTRON LIMITED
Song yun Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE MANUFACTURING METHOD AND PROCESSING SYSTEM
Publication number
20200373480
Publication date
Nov 26, 2020
TOKYO ELECTRON LIMITED
Takuya KUBO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCHING
Publication number
20200243759
Publication date
Jul 30, 2020
TOKYO ELECTRON LIMITED
Takuya KUBO
G11 - INFORMATION STORAGE
Information
Patent Application
METHOD OF CLEANING A SUBSTRATE PROCESSING APPARATUS AND THE SUBSTRA...
Publication number
20190355901
Publication date
Nov 21, 2019
TOKYO ELECTRON LIMITED
Takuya KUBO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Processing Workpiece
Publication number
20190109282
Publication date
Apr 11, 2019
TOKYO ELECTRON LIMITED
Takuya KUBO
G11 - INFORMATION STORAGE
Information
Patent Application
METHOD OF CLEANING AND METHOD OF PLASMA PROCESSING
Publication number
20180301622
Publication date
Oct 18, 2018
TOKYO ELECTRON LIMITED
Takuya KUBO
G11 - INFORMATION STORAGE
Information
Patent Application
METHOD FOR ETCHING MULTILAYER FILM
Publication number
20180190500
Publication date
Jul 5, 2018
TOKYO ELECTRON LIMITED
Takuya KUBO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Etching Method
Publication number
20180182957
Publication date
Jun 28, 2018
TOKYO ELECTRON LIMITED
Takuya KUBO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING MAGNETORESISTIVE DEVICE AND MAGNETORESISTIV...
Publication number
20170346001
Publication date
Nov 30, 2017
TOKYO ELECTRON LIMITED
Takuya KUBO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ETCHING OBJECT TO BE PROCESSED
Publication number
20170200886
Publication date
Jul 13, 2017
TOKYO ELECTRON LIMITED
Tamotsu MORIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ZnO FILM PRODUCTION DEVICE, AND PRODUCTION METHOD
Publication number
20150225846
Publication date
Aug 13, 2015
TOKYO ELECTRON LIMITED
Song yun Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA GENERATION DEVICE AND PLASMA PROCESSING APPARATUS
Publication number
20140299272
Publication date
Oct 9, 2014
Akihiro TSUJI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING FILTRATION FILTER
Publication number
20130240479
Publication date
Sep 19, 2013
Tsuyoshi MORIYA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
FILM FORMATION APPARATUS
Publication number
20120247390
Publication date
Oct 4, 2012
TOKYO ELECTRON LIMITED
Ikuo Sawada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
QUANTUM DOT FORMING METHOD, STORAGE MEDIUM STORING A PROGRAM AND SU...
Publication number
20120052658
Publication date
Mar 1, 2012
TOKYO ELECTRON LIMITED
Song Yun KANG
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20110017706
Publication date
Jan 27, 2011
TOKYO ELECTRON LIMITED
Tetsuro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RLSA CVD DEPOSITION CONTROL USING HALOGEN GAS FOR HYDROGEN SCAVENGING
Publication number
20090241310
Publication date
Oct 1, 2009
TOKYO ELECTRON LIMITED
Jozef Brcka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film forming method and apparatus
Publication number
20070243327
Publication date
Oct 18, 2007
Song Yun Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Electron beam processing method and apparatus
Publication number
20040248040
Publication date
Dec 9, 2004
TOKYO ELECTRON LIMITED
Kazuyuki Mitsuoka
H01 - BASIC ELECTRIC ELEMENTS