Song ZHANG

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, substrate processing apparatus, and re...
- Patent number 11,921,426
- Issue date Mar 5, 2024
- SCREEN Holdings Co., Ltd.
- Katsuya Akiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 11,901,173
- Issue date Feb 13, 2024
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate processing method, substrate processing apparatus, and re...
- Patent number 11,543,752
- Issue date Jan 3, 2023
- SCREEN Holdings Co., Ltd.
- Katsuya Akiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,260,431
- Issue date Mar 1, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,211,241
- Issue date Dec 28, 2021
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,792,712
- Issue date Oct 6, 2020
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250050385
- Publication date Feb 13, 2025
- SCREEN Holdings Co., Ltd.
- Song ZHANG
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND POLYM...
- Publication number 20240165657
- Publication date May 23, 2024
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RE...
- Publication number 20230098367
- Publication date Mar 30, 2023
- SCREEN Holdings Co., Ltd.
- Katsuya AKIYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20220076941
- Publication date Mar 10, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RE...
- Publication number 20210165328
- Publication date Jun 3, 2021
- SCREEN Holdings Co., Ltd.
- Katsuya AKIYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200384510
- Publication date Dec 10, 2020
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190371599
- Publication date Dec 5, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190366394
- Publication date Dec 5, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Person

Patents Grantslast 30 patents

Substrate processing method, substrate processing apparatus, and re...

Substrate processing method

Substrate processing method, substrate processing apparatus, and re...

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND POLYM...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RE...

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RE...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS