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Songlin Xu
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Advanced processing technique and system for preserving tungsten in...
Patent number
8,093,157
Issue date
Jan 10, 2012
Mattson Technology, Inc.
Li Diao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for removal of photoresist in transistor fabricat...
Patent number
7,799,685
Issue date
Sep 21, 2010
Mattson Technology, Inc.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer tilt detection apparatus and method
Patent number
7,561,258
Issue date
Jul 14, 2009
Mattson Technology, Inc.
Songlin Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methodology for in-situ and real-time chamber condition monitoring...
Patent number
7,067,432
Issue date
Jun 27, 2006
Applied Materials, Inc.
Songlin Xu
G01 - MEASURING TESTING
Information
Patent Grant
Methodologies to reduce process sensitivity to the chamber condition
Patent number
6,808,647
Issue date
Oct 26, 2004
Songlin Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of operating a dual chamber reactor with neutral density dec...
Patent number
6,635,578
Issue date
Oct 21, 2003
Applied Materials, Inc.
Songlin Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for enhancing etching of TiSix
Patent number
6,544,896
Issue date
Apr 8, 2003
Applied Materials Inc.
Songlin Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma assisted processing chamber with separate control of species...
Patent number
6,352,049
Issue date
Mar 5, 2002
Applied Materials, Inc.
Gerald Yin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching polycide structures
Patent number
6,008,139
Issue date
Dec 28, 1999
Applied Materials Inc.
Shaoher Pan
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method and Apparatus for Plasma Process Performance Matching in Mul...
Publication number
20090206056
Publication date
Aug 20, 2009
Songlin Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Advanced Processing Technique and System for Preserving Tungsten in...
Publication number
20090011615
Publication date
Jan 8, 2009
Li Diao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Selective etching method and apparatus
Publication number
20080124937
Publication date
May 29, 2008
Songlin Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and method for removal of photoresist and stop layer followi...
Publication number
20070269975
Publication date
Nov 22, 2007
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer Tilt Detection Apparatus and Method
Publication number
20070269910
Publication date
Nov 22, 2007
Songlin Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and method for removal of photoresist in transistor fabricat...
Publication number
20050112883
Publication date
May 26, 2005
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Novel methodology for in-situ and real-time chamber condition monit...
Publication number
20040263827
Publication date
Dec 30, 2004
APPLIED MATERIALS, INC.
Songlin Xu
G01 - MEASURING TESTING
Information
Patent Application
Methods of forming polymer films and of using such polymer films to...
Publication number
20040157466
Publication date
Aug 12, 2004
Songlin Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods of using polymer films to form micro-structures
Publication number
20040157457
Publication date
Aug 12, 2004
Songlin Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for etching polysilicon gates with good mask selectivity, c...
Publication number
20040152331
Publication date
Aug 5, 2004
APPLIED MATERIALS, INC.
Songlin Xu
H01 - BASIC ELECTRIC ELEMENTS