Songping Gao

Person

Southborough, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Scattered light measurement system
- Patent number 9,518,930
- Issue date Dec 13, 2016
- KLA-Tencor Corporation
- Neil Judell
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspecting a workpiece using scattered light
- Patent number 8,537,350
- Issue date Sep 17, 2013
- KLA-Tencor Corporation
- Neil Judell
- G01 - MEASURING TESTING
Information Patent Grant
Inspecting a workpiece using polarization of scattered light
- Patent number 8,059,268
- Issue date Nov 15, 2011
- KLA-Tencor Corporation
- Neil Judell
- G01 - MEASURING TESTING
Information Patent Grant
System and method for controlling a beam source in a workpiece surf...
- Patent number 7,839,495
- Issue date Nov 23, 2010
- KLA-Tencor Corporation
- Bruce Baran
- G01 - MEASURING TESTING
Information Patent Grant
System and method for inspecting a workpiece surface using polariza...
- Patent number 7,623,227
- Issue date Nov 24, 2009
- KLA-Tencor Corporation
- Neil Judell
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for controlling a beam source in a workpiece surf...
- Patent number 7,557,910
- Issue date Jul 7, 2009
- KLA-Tencor Corporation
- Bruce Baran
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and apparatus for identifying the material of a particle oc...
- Patent number 6,122,047
- Issue date Sep 19, 2000
- ADE Optical Systems Corporation
- John C. Stover
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
System With Polarized Scattered Light
- Publication number 20130342833
- Publication date Dec 26, 2013
- KLA-Tencor Corporation
- Neil Judell
- G01 - MEASURING TESTING
Information Patent Application
Inspecting a Workpiece Using Polarization of Scattered Light
- Publication number 20120013898
- Publication date Jan 19, 2012
- KLA-Tencor Corporation
- Neil Judell
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and Method for Controlling a Beam Source in a Workpiece Surf...
- Publication number 20100149527
- Publication date Jun 17, 2010
- KLA-Tencor Corporation
- Bruce Baran
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspecting a Workpiece Using Polarization of Scattered Light
- Publication number 20100110420
- Publication date May 6, 2010
- KLA-Tencor Corporation
- Neil Judell
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and method for controlling a beam source in a workpiece surf...
- Publication number 20070252977
- Publication date Nov 1, 2007
- Bruce Baran
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and method for inspecting a workpiece surface using polariza...
- Publication number 20060192948
- Publication date Aug 31, 2006
- Neil Judell
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and method for inspecting a workpiece surface using combinat...
- Publication number 20060192950
- Publication date Aug 31, 2006
- Neil Judell
- G06 - COMPUTING CALCULATING COUNTING

Songping Gao

Person

Patents Grantslast 30 patents

Scattered light measurement system

Inspecting a workpiece using scattered light

Inspecting a workpiece using polarization of scattered light

System and method for controlling a beam source in a workpiece surf...

System and method for inspecting a workpiece surface using polariza...

System and method for controlling a beam source in a workpiece surf...

Methods and apparatus for identifying the material of a particle oc...

Patents Applicationslast 30 patents

System With Polarized Scattered Light

Inspecting a Workpiece Using Polarization of Scattered Light

System and Method for Controlling a Beam Source in a Workpiece Surf...

Inspecting a Workpiece Using Polarization of Scattered Light

System and method for controlling a beam source in a workpiece surf...

System and method for inspecting a workpiece surface using polariza...

System and method for inspecting a workpiece surface using combinat...