Songyun KANG

Person

Suwon-si, KR

People

Patents Applicationslast 30 patents

Information Patent Application
INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS
- Publication number 20240395501
- Publication date Nov 28, 2024
- Samsung Electronics Co., Ltd.
- Hyojin PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, A...
- Publication number 20240162014
- Publication date May 16, 2024
- Samsung Electronics Co., Ltd.
- Heewon Min
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTING DEVICE, A SUBSTRATE PROCESSING APPARATUS INCLU...
- Publication number 20240162017
- Publication date May 16, 2024
- Samsung Electronics Co., Ltd.
- Heewon MIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BRUSH FOR CLEANING A WAFER
- Publication number 20240148133
- Publication date May 9, 2024
- Samsung Electronics Co., Ltd.
- Jeongmin Na
- A46 - BRUSHWARE
Information Patent Application
APPARATUS FOR CLEANING WAFER
- Publication number 20230402299
- Publication date Dec 14, 2023
- Samsung Electronics Co., Ltd.
- Hyojin Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS GAS FOR CRYOGENIC ETCHING, PLASMA ETCHING APPARATUS, AND ME...
- Publication number 20230230840
- Publication date Jul 20, 2023
- Samsung Electronics Co., Ltd.
- Dongkyu LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD USING THE...
- Publication number 20230052061
- Publication date Feb 16, 2023
- Samsung Electronics Co., Ltd.
- Hyojin PARK
- B24 - GRINDING POLISHING

Songyun KANG

Person

Patents Applicationslast 30 patents

INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS

PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, A...

SUBSTRATE SUPPORTING DEVICE, A SUBSTRATE PROCESSING APPARATUS INCLU...

BRUSH FOR CLEANING A WAFER

APPARATUS FOR CLEANING WAFER

PROCESS GAS FOR CRYOGENIC ETCHING, PLASMA ETCHING APPARATUS, AND ME...

SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD USING THE...