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Sonia Castillo
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Hayward, CA, US
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last 30 patents
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Patent Grant
Corrosion resistant aluminum coating on plasma chamber components
Patent number
9,337,002
Issue date
May 10, 2016
Lam Research Corporation
John Daugherty
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Patents Applications
last 30 patents
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Patent Application
COMPONENT OF A PLASMA PROCESSING APPARATUS INCLUDING AN ELECTRICALL...
Publication number
20150187615
Publication date
Jul 2, 2015
LAM RESEARCH CORPORATION
John Daugherty
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
CORROSION RESISTANT ALUMINUM COATING ON PLASMA CHAMBER COMPONENTS
Publication number
20140272459
Publication date
Sep 18, 2014
LAM RESEARCH CORPORATION
John Daugherty
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...