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Sonia Margart Skelly
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Veldhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Controlling the flow through the collector during cleaning
Patent number
7,465,943
Issue date
Dec 16, 2008
ASML Netherlands B.V.
Vadim Yevgenyevich Banine
B82 - NANO-TECHNOLOGY
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,342,237
Issue date
Mar 11, 2008
ASML Netherlands B.V.
Ronald Walther Jeanne Severijns
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Controlling the flow through the collector during cleaning
Publication number
20070131878
Publication date
Jun 14, 2007
ASML NETHERLANDS B.V.
Vadim Yevgenyevich Banine
B82 - NANO-TECHNOLOGY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060197036
Publication date
Sep 7, 2006
ASML NETHERLANDS B.V.
Ronald Walther Jeanne Severijns
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY