SOO HAN SONG

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Gyeonggi-do, KR

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Patents Applicationslast 30 patents

Information Patent Application
WAFER HEATING APPARATUS AND WAFER PROCESSING APPARATUS USING THE SAME
- Publication number 20240096663
- Publication date Mar 21, 2024
- SEMES CO., LTD.
- Soo Han SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIT FOR SUPPLYING CHEMICAL AND APPARATUS FOR TREATING SUBSTRATE WI...
- Publication number 20240047236
- Publication date Feb 8, 2024
- SEMES CO., LTD.
- Soo Han SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT UNIT AND SUBSTRATE TREATING APPARATUS
- Publication number 20220319905
- Publication date Oct 6, 2022
- SEMES CO., LTD.
- SOO HAN SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORTING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
- Publication number 20220181168
- Publication date Jun 9, 2022
- SEMES CO., LTD.
- KANG SEOP YUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT UNIT AND APPARATUS FOR TREATING SUBSTRATE
- Publication number 20220157645
- Publication date May 19, 2022
- SEMES CO., LTD.
- SOO HAN SONG
- H01 - BASIC ELECTRIC ELEMENTS