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Soo-Yeon Mo
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Hwaseong-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Deep learning-based overlay key centering system and method thereof
Patent number
12,002,249
Issue date
Jun 4, 2024
AUROS TECHNOLOGY, INC.
Soo-Yeon Mo
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Correlation-based overlay key centering system and method thereof
Patent number
11,847,777
Issue date
Dec 19, 2023
AUROS TECHNOLOGY, INC.
Soo-Yeon Mo
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
DEEP LEARNING-BASED OVERLAY KEY CENTERING SYSTEM AND METHOD THEREOF
Publication number
20240161441
Publication date
May 16, 2024
AUROS TECHNOLOGY, INC.
Soo-Yeon MO
G06 - COMPUTING CALCULATING COUNTING