TREA

Soon K. Yuh

Follow

Person

  • Scotts Valley, CA, US
People

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Method of depositing an oxide film by chemical vapor deposition
    • Publication number 20040018735
    • Publication date Jan 29, 2004
    • Seung G. Park
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Atmospheric pressure wafer processing reactor having an internal pr...
    • Publication number 20030094136
    • Publication date May 22, 2003
    • Lawrence D. Bartholomew
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Protective shield and system for gas distribution
    • Publication number 20030061991
    • Publication date Apr 3, 2003
    • ASML US, Inc.
    • Colby Mattson
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Gas distribution system
    • Publication number 20020192377
    • Publication date Dec 19, 2002
    • Lawrence Duane Bartholomew
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Gas distribution system
    • Publication number 20010047756
    • Publication date Dec 6, 2001
    • Lawrence Duane Bartholomew
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...