Soon Yoeng TAN

Follow

Person

Skudai, MY

People

Patents Grantslast 30 patents

Information Patent Grant
Mask and method to pattern chromeless phase lithography contact hole
- Patent number 8,057,968
- Issue date Nov 15, 2011
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask and method to pattern chromeless phase lithography contact hole
- Patent number 7,655,388
- Issue date Feb 2, 2010
- Chartered Semiconductor Manufacturing, Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for contact hole unit cell formation
- Patent number 7,556,891
- Issue date Jul 7, 2009
- Chartered Semiconductor Manufacturing Ltd.
- Soon Yoeng Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for dual damascene patterning with single exposure using tri...
- Patent number 7,288,366
- Issue date Oct 30, 2007
- Chartered Semiconductor Manufacturing Ltd.
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Half tone alternating phase shift masks
- Patent number 7,014,962
- Issue date Mar 21, 2006
- Chartered Semiconductor Manufacturing, Ltd.
- Qun Ying Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MASK AND METHOD TO PATTERN CHROMELESS PHASE LITHOGRAPHY CONTACT HOLE
- Publication number 20100196805
- Publication date Aug 5, 2010
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Sia Kim TAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask and method to pattern chromeless phase lithography contact hole
- Publication number 20060147813
- Publication date Jul 6, 2006
- Sya Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for contact hole unit cell formation
- Publication number 20060088770
- Publication date Apr 27, 2006
- Chartered Semiconductor Manufacturing LTD.
- Soon Yoeng Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for dual damascene patterning with single exposure using tri...
- Publication number 20050089763
- Publication date Apr 28, 2005
- Sia Kim Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Half tone alternating phase shift masks
- Publication number 20050058912
- Publication date Mar 17, 2005
- Qun Ying Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY