Soon Yoong LOH

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Masai, MY

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Patents Grantslast 30 patents

Information Patent Grant
Method for reducing sidewall etch residue
- Patent number 8,153,527
- Issue date Apr 10, 2012
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Soon Yoong Loh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR REDUCING SIDEWALL ETCH RESIDUE
- Publication number 20100091424
- Publication date Apr 15, 2010
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Soon Yoong LOH
- H01 - BASIC ELECTRIC ELEMENTS