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Soonwook Jung
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma ignition optimization in semiconductor processing chambers
Patent number
11,894,217
Issue date
Feb 6, 2024
Applied Materials, Inc.
Soonwook Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for improved semiconductor etching and componen...
Patent number
11,735,441
Issue date
Aug 22, 2023
Applied Materials, Inc.
Tien Fak Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma ignition optimization in semiconductor processing chambers
Patent number
11,587,765
Issue date
Feb 21, 2023
Applied Materials, Inc.
Soonwook Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic induction plasma source for semiconductor processes and eq...
Patent number
10,593,560
Issue date
Mar 17, 2020
Applied Materials, Inc.
Tae Seung Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical emission spectroscopic techniques for monitoring etching
Patent number
10,541,184
Issue date
Jan 21, 2020
Applied Materials, Inc.
Soonwook Jung
G01 - MEASURING TESTING
Information
Patent Grant
Systems and methods for improved semiconductor etching and componen...
Patent number
10,522,371
Issue date
Dec 31, 2019
Applied Materials, Inc.
Tien Fak Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for improved semiconductor etching and componen...
Patent number
10,504,754
Issue date
Dec 10, 2019
Applied Materials, Inc.
Tien Fak Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adjustable remote dissociation
Patent number
9,922,840
Issue date
Mar 20, 2018
Applied Materials, Inc.
Soonam Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ spatially resolved plasma monitoring by using optical emiss...
Patent number
9,874,524
Issue date
Jan 23, 2018
Applied Materials, Inc.
Tae Seung Cho
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA IGNITION OPTIMIZATION IN SEMICONDUCTOR PROCESSING CHAMBERS
Publication number
20230197405
Publication date
Jun 22, 2023
Applied Materials, Inc.
Soonwook Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODEL-BASED CHARACTERIZATION OF PLASMAS IN SEMICONDUCTOR PROCESSING...
Publication number
20230096706
Publication date
Mar 30, 2023
Applied Materials, Inc.
Soonwook Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBER ADAPTER
Publication number
20230005765
Publication date
Jan 5, 2023
Applied Materials, Inc.
Son T. Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA IGNITION OPTIMIZATION IN SEMICONDUCTOR PROCESSING CHAMBERS
Publication number
20220165539
Publication date
May 26, 2022
Applied Materials, Inc.
Soonwook Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS, APPARATUS, AND SYSTEMS FOR PROCESSING A SUBSTRATE
Publication number
20210005435
Publication date
Jan 7, 2021
Applied Materials, Inc.
Soonwook Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR IMPROVED SEMICONDUCTOR ETCHING AND COMPONEN...
Publication number
20200118845
Publication date
Apr 16, 2020
Applied Materials, Inc.
Tien Fak Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC INDUCTION PLASMA SOURCE FOR SEMICONDUCTOR PROCESSES AND EQ...
Publication number
20190272999
Publication date
Sep 5, 2019
Applied Materials, Inc.
Tae Seung Cho
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
OPTICAL EMISSION SPECTROSCOPIC TECHNIQUES FOR MONITORING ETCHING
Publication number
20190019734
Publication date
Jan 17, 2019
Applied Materials, Inc.
Soonwook Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA POWER TOOL MATCHING USING DC VOLTAGE FEEDBACK
Publication number
20180366300
Publication date
Dec 20, 2018
Applied Materials, Inc.
Soonwook Jung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBER FOR IMPROVED PRECURSOR FLOW
Publication number
20180337024
Publication date
Nov 22, 2018
Applied Materials, Inc.
Tien Fak Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR IMPROVED SEMICONDUCTOR ETCHING AND COMPONEN...
Publication number
20170338133
Publication date
Nov 23, 2017
Applied Materials, Inc.
Tien Fak Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR IMPROVED SEMICONDUCTOR ETCHING AND COMPONEN...
Publication number
20170338134
Publication date
Nov 23, 2017
Applied Materials, Inc.
Tien Fak Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-SITU SPATIALLY RESOLVED PLASMA MONITORING BY USING OPTICAL EMISS...
Publication number
20170254755
Publication date
Sep 7, 2017
Applied Materials, Inc.
Tae Seung CHO
G01 - MEASURING TESTING
Information
Patent Application
ADJUSTABLE REMOTE DISSOCIATION
Publication number
20170011931
Publication date
Jan 12, 2017
Applied Materials, Inc.
Soonam Park
H01 - BASIC ELECTRIC ELEMENTS