Sooyun Joh

Person

Livermore, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for forming thin protective and optical layers on substrates
- Patent number 10,526,708
- Issue date Jan 7, 2020
- Aixtron SE
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating units for processing a substrate
- Patent number 10,049,859
- Issue date Aug 14, 2018
- Aixtron SE
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for plasma processing
- Patent number 9,443,702
- Issue date Sep 13, 2016
- Aixtron SE
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for dielectric deposition
- Patent number 9,359,674
- Issue date Jun 7, 2016
- Aixtron, Inc.
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for plasma processing
- Patent number 9,096,932
- Issue date Aug 4, 2015
- Aixtron, Inc.
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for plasma processing
- Patent number 9,096,933
- Issue date Aug 4, 2015
- Aixtron, Inc.
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for dielectric deposition
- Patent number 8,765,232
- Issue date Jul 1, 2014
- Plasmasi, Inc.
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for plasma processing
- Patent number 8,697,197
- Issue date Apr 15, 2014
- Plasmasi, Inc.
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flexible gas mixing manifold
- Patent number 8,291,935
- Issue date Oct 23, 2012
- Novellus Systems, Inc.
- Neil J. Merritt
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Uniform fluid distribution and exhaust system for a chemical-mechan...
- Patent number 6,918,824
- Issue date Jul 19, 2005
- Novellus Systems, Inc.
- Dave Marquardt
- B24 - GRINDING POLISHING
Information Patent Grant
Mixing of materials in an integrated circuit manufacturing equipment
- Patent number 6,758,591
- Issue date Jul 6, 2004
- Novellus Systems, Inc.
- Peter Krotov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR FORMING THIN PROTECTIVE AND OPTICAL LAYERS ON SUBSTRATES
- Publication number 20180202046
- Publication date Jul 19, 2018
- AIXTRON SE
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR FORMING THIN PROTECTIVE AND OPTICAL LAYERS...
- Publication number 20160289837
- Publication date Oct 6, 2016
- Aixtron, Inc.
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR PLASMA PROCESSING
- Publication number 20150270109
- Publication date Sep 24, 2015
- Aixtron, Inc.
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR DIELECTRIC DEPOSITION
- Publication number 20140314965
- Publication date Oct 23, 2014
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR PLASMA PROCESSING
- Publication number 20140220262
- Publication date Aug 7, 2014
- PlasmaSi, Inc.
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR PLASMA PROCESSING
- Publication number 20140212601
- Publication date Jul 31, 2014
- PlasmaSi, Inc.
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR FORMING THIN PROTECTIVE AND OPTICAL LAYERS...
- Publication number 20130337657
- Publication date Dec 19, 2013
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR DIELECTRIC DEPOSITION
- Publication number 20120225218
- Publication date Sep 6, 2012
- PlasmaSi, Inc.
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Generating Units for Processing a Substrate
- Publication number 20110005681
- Publication date Jan 13, 2011
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for Plasma Processing
- Publication number 20110005682
- Publication date Jan 13, 2011
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Plasma Processing
- Publication number 20110006040
- Publication date Jan 13, 2011
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Uniform fluid distribution and exhaust system for a chemical-mechan...
- Publication number 20050070214
- Publication date Mar 31, 2005
- Dave Marquardt
- B24 - GRINDING POLISHING

Person

Patents Grantslast 30 patents

Methods for forming thin protective and optical layers on substrates

Plasma generating units for processing a substrate

Methods for plasma processing

Apparatus and method for dielectric deposition

Methods for plasma processing

Methods for plasma processing

Apparatus and method for dielectric deposition

Methods for plasma processing

Flexible gas mixing manifold

Uniform fluid distribution and exhaust system for a chemical-mechan...

Mixing of materials in an integrated circuit manufacturing equipment

Patents Applicationslast 30 patents

METHODS FOR FORMING THIN PROTECTIVE AND OPTICAL LAYERS ON SUBSTRATES

APPARATUS AND METHOD FOR FORMING THIN PROTECTIVE AND OPTICAL LAYERS...

METHODS FOR PLASMA PROCESSING

APPARATUS AND METHOD FOR DIELECTRIC DEPOSITION

METHODS FOR PLASMA PROCESSING

METHODS FOR PLASMA PROCESSING

APPARATUS AND METHOD FOR FORMING THIN PROTECTIVE AND OPTICAL LAYERS...

APPARATUS AND METHOD FOR DIELECTRIC DEPOSITION

Plasma Generating Units for Processing a Substrate

Apparatus for Plasma Processing

Methods for Plasma Processing

Uniform fluid distribution and exhaust system for a chemical-mechan...