Souichi Nishijima

Follow

Person

Miyagi, JP

People

Patents Applicationslast 30 patents

Information Patent Application
MICROWAVE PLASMA SOURCE AND MICROWAVE PLASMA PROCESSING APPARATUS
- Publication number 20180127880
- Publication date May 10, 2018
- TOKYO ELECTRON LIMITED
- Koji Kotani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD AND STORAG...
- Publication number 20110264250
- Publication date Oct 27, 2011
- Tokyo Electron Limited
- Masaru Nishimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...