TREA

Souji Koikari

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  • Numazu, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Electron beam exposure apparatus
    • Patent number 6,319,642
    • Issue date Nov 20, 2001
    • Kabushiki Kaisha Toshiba
    • Shigehiro Hara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Charged particle beam exposure system
    • Patent number 5,912,468
    • Issue date Jun 15, 1999
    • Kabushiki Kaisha Toshiba
    • Ryoichi Hirano
    • B82 - NANO-TECHNOLOGY
  • Information Patent Grant

    Charged beam drawing method
    • Patent number 5,894,057
    • Issue date Apr 13, 1999
    • Kabushiki Kaisha Toshiba
    • Toshio Yamaguchi
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Charged particle beam lithograph apparatus
    • Patent number 5,850,083
    • Issue date Dec 15, 1998
    • Kabushiki Kaisha Toshiba
    • Souji Koikari
    • H01 - BASIC ELECTRIC ELEMENTS