Soundarrajan JEMBULINGAM

Person

Lalgudi, IN

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for processing a substrate using improved shi...
- Patent number 11,621,152
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Soundarrajan Jembulingam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing a substrate using improved shi...
- Patent number 11,508,563
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Soundarrajan Jembulingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal lift for semiconductor processing chambers
- Patent number 11,251,067
- Issue date Feb 15, 2022
- Applied Materials, Inc.
- Brian T. West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature biasable substrate support
- Patent number 11,056,372
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Brian T. West
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Gas cooled electrostatic chuck (ESC) having a gas channel formed th...
- Patent number 10,781,518
- Issue date Sep 22, 2020
- Applied Materials, Inc.
- Brian T. West
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE USING IMPROVED SHI...
- Publication number 20220375734
- Publication date Nov 24, 2022
- Soundarrajan JEMBULINGAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE USING IMPROVED SHI...
- Publication number 20220375735
- Publication date Nov 24, 2022
- Soundarrajan JEMBULINGAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE USING IMPROVED SHI...
- Publication number 20220213590
- Publication date Jul 7, 2022
- Uday PAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE BIASABLE SUBSTRATE SUPPORT
- Publication number 20200350195
- Publication date Nov 5, 2020
- Applied Materials, Inc.
- Brian T. WEST
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
PEDESTAL LIFT FOR SEMICONDUCTOR PROCESSING CHAMBERS
- Publication number 20200343126
- Publication date Oct 29, 2020
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS COOLED MINIMAL CONTACT AREA(MCA) ELECTROSTATIC CHUCK(ESC) FOR A...
- Publication number 20160172226
- Publication date Jun 16, 2016
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Soundarrajan JEMBULINGAM

Person

Patents Grantslast 30 patents

Methods and apparatus for processing a substrate using improved shi...

Methods and apparatus for processing a substrate using improved shi...

Pedestal lift for semiconductor processing chambers

Low temperature biasable substrate support

Gas cooled electrostatic chuck (ESC) having a gas channel formed th...

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE USING IMPROVED SHI...

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE USING IMPROVED SHI...

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE USING IMPROVED SHI...

LOW TEMPERATURE BIASABLE SUBSTRATE SUPPORT

PEDESTAL LIFT FOR SEMICONDUCTOR PROCESSING CHAMBERS

GAS COOLED MINIMAL CONTACT AREA(MCA) ELECTROSTATIC CHUCK(ESC) FOR A...