TREA

Spencer Preston

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  • Chandler, AZ, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Backing pad
    • Patent number 5,791,975
    • Issue date Aug 11, 1998
    • Speedfam Corporation
    • Joseph V. Cesna
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Wafer polishing method and apparatus
    • Patent number 5,498,199
    • Issue date Mar 12, 1996
    • Speedfam Corporation
    • Chris E. Karlsrud
    • G05 - CONTROLLING REGULATING