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Sri Ayu ANGGRAINI
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Tosu-shi, Saga, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Nitride piezoelectric body and MEMS device using same
Patent number
11,999,615
Issue date
Jun 4, 2024
National Institute of Advanced Industrial Science and Technology
Kenji Hirata
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Piezoelectric body and MEMS device using same
Patent number
11,968,902
Issue date
Apr 23, 2024
National Institute of Advanced Industrial Science and Technology
Masato Uehara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
ScAlN LAMINATE AND MANUFACTURING METHOD THEREOF
Publication number
20240228282
Publication date
Jul 11, 2024
National Institute of Advanced Industrial Science and Technology
Kenji HIRATA
C01 - INORGANIC CHEMISTRY
Information
Patent Application
NITRIDE MATERIAL, PIEZOELECTRIC BODY FORMED OF SAME, AND MEMS DEVIC...
Publication number
20240101423
Publication date
Mar 28, 2024
National Institute of advanced Industrial Science and Technology
Sri Ayu ANGGRAINI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
NITRIDE PIEZOELECTRIC BODY AND MEMS DEVICE USING SAME
Publication number
20220274886
Publication date
Sep 1, 2022
National Institute of Advanced Industrial Science and Technology
Sri Ayu ANGGRAINI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NITRIDE PIEZOELECTRIC BODY AND MEMS DEVICE USING SAME
Publication number
20220073348
Publication date
Mar 10, 2022
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Kenji HIRATA
C01 - INORGANIC CHEMISTRY
Information
Patent Application
PIEZOELECTRIC BODY AND MEMS DEVICE USING SAME
Publication number
20220037582
Publication date
Feb 3, 2022
National Institute of Advanced Industrial Science Technology
Masato UEHARA
B81 - MICRO-STRUCTURAL TECHNOLOGY