Srinivasan M. Komandur

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Distributed control system for semiconductor manufacturing equipment
- Patent number 6,736,929
- Issue date May 18, 2004
- Nutool, Inc.
- Srinivasan M. Komandur
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
Distributed control system for semiconductor manufacturing equipment
- Publication number 20040089421
- Publication date May 13, 2004
- Srinivasan M. Komandur
- G05 - CONTROLLING REGULATING
Information Patent Application
Distributed control system for semiconductor manufacturing equipment
- Publication number 20030155073
- Publication date Aug 21, 2003
- Srinivasan M. Komandur
- G05 - CONTROLLING REGULATING