SRISKANTHARAJAH THIRUNAVUKARASU

Person

Singapore, SG

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for mask patterning debris removal
- Patent number 12,068,159
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Karthik Narayanan Balakrishnan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for warpage correction
- Patent number 11,871,667
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lattice coat surface enhancement for chamber components
- Patent number 11,739,411
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Lit Ping Lam
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Mainframe-less wafer transfer platform with linear transfer system...
- Patent number 11,721,583
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for controlling warpage in wafer level packag...
- Patent number 11,421,316
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Prayudi Lianto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hybrid wafer dicing approach using an actively-focused laser beam l...
- Patent number 11,342,226
- Issue date May 24, 2022
- Applied Materials, Inc.
- Karthik Balakrishnan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods for bonding substrates
- Patent number 11,309,278
- Issue date Apr 19, 2022
- Applied Materials, Inc.
- Prayudi Lianto
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate vacuum transport and storage apparatus
- Patent number 11,302,549
- Issue date Apr 12, 2022
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,177,146
- Issue date Nov 16, 2021
- Applied Materials, Inc.
- Qi Jie Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrier system utilizing electrostatic chucking to accomm...
- Patent number 11,111,583
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nozzle for uniform plasma processing
- Patent number 11,053,590
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Rohit Mishra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sealing structure for workpiece to substrate bonding in a processin...
- Patent number 10,978,334
- Issue date Apr 13, 2021
- Applied Materials, Inc.
- Chin Hock Toh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for handling various sized substrates
- Patent number 10,930,542
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adhesive-less substrate bonding to carrier plate
- Patent number 10,847,400
- Issue date Nov 24, 2020
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image based substrate mapper
- Patent number 10,784,134
- Issue date Sep 22, 2020
- Applied Materials, Inc.
- Eng Sheng Peh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Hybrid substrate carrier
- Patent number 10,777,442
- Issue date Sep 15, 2020
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrier for active/passive bonding and de-bonding of a su...
- Patent number 10,607,870
- Issue date Mar 31, 2020
- Applied Materials, Inc.
- Jen Sern Lew
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-cassette carrying case
- Patent number 10,566,226
- Issue date Feb 18, 2020
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for backside cleaning of substrates
- Patent number 10,549,324
- Issue date Feb 4, 2020
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- B08 - CLEANING
Information Patent Grant
Bridging front opening unified pod (FOUP)
- Patent number 10,504,762
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Karrthik Parathithasan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nozzle for uniform plasma processing
- Patent number 10,465,288
- Issue date Nov 5, 2019
- Applied Materials, Inc.
- Rohit Mishra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Next generation warpage measurement system
- Patent number 10,446,423
- Issue date Oct 15, 2019
- Applied Materials, Inc.
- Jun-Liang Su
- G01 - MEASURING TESTING
Information Patent Grant
Substrate transfer chamber
- Patent number 10,347,516
- Issue date Jul 9, 2019
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for correcting substrate deformity
- Patent number 10,325,790
- Issue date Jun 18, 2019
- Applied Materials, Inc.
- Eng Sheng Peh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for reducing substrate sliding in process cham...
- Patent number 10,262,877
- Issue date Apr 16, 2019
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for transferring a substrate
- Patent number 10,153,187
- Issue date Dec 11, 2018
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for solid state source array design and fabric...
- Patent number 10,154,586
- Issue date Dec 11, 2018
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for backside cleaning of substrates
- Patent number 9,993,853
- Issue date Jun 12, 2018
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for nodule control in a titanium-tungsten target
- Patent number 9,960,023
- Issue date May 1, 2018
- Applied Materials, Inc.
- Junqi Wei
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Substrate carrier system utilizing electrostatic chucking to accomm...
- Patent number 9,845,533
- Issue date Dec 19, 2017
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR MASK PATTERNING DEBRIS REMOVAL
- Publication number 20240363348
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Karthik Narayanan BALAKRISHNAN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS AND APPARATUS FOR MASK PATTERNING DEBRIS REMOVAL
- Publication number 20220319847
- Publication date Oct 6, 2022
- Karthik Narayanan BALAKRISHNAN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
HYBRID WAFER DICING APPROACH USING AN ACTIVELY-FOCUSED LASER BEAM L...
- Publication number 20220246476
- Publication date Aug 4, 2022
- Applied Materials, Inc.
- Karthik Balakrishnan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SHADOW RING KIT FOR PLASMA ETCH WAFER SINGULATION PROCESS
- Publication number 20220108908
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Karthik Elumalai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR WARPAGE CORRECTION
- Publication number 20220085268
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Sriskantharajah THIRUNAVUKARASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAINFRAME-LESS WAFER TRANSFER PLATFORM FOR WAFER PROCESSING MODULES
- Publication number 20220044968
- Publication date Feb 10, 2022
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LATTICE COAT SURFACE ENHANCEMENT FOR CHAMBER COMPONENTS
- Publication number 20210130948
- Publication date May 6, 2021
- Applied Materials, Inc.
- Lit Ping LAM
- B22 - CASTING POWDER METALLURGY
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20210134627
- Publication date May 6, 2021
- Applied Materials, Inc.
- Qi Jie Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CONTACTLESS SUBSTRATE WARPAGE CORRECTION
- Publication number 20210057238
- Publication date Feb 25, 2021
- Applied Materials, Inc.
- CHIN WEI TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID WAFER DICING APPROACH USING AN ACTIVELY-FOCUSED LASER BEAM L...
- Publication number 20210050262
- Publication date Feb 18, 2021
- Applied Materials, Inc.
- Karthik Balakrishnan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS AND APPARATUS FOR SUBSTRATE WARPAGE CORRECTION
- Publication number 20210035795
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Qi Jie PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR REMOVING ABRASIVE PARTICLES
- Publication number 20200306931
- Publication date Oct 1, 2020
- Applied Materials, Inc.
- PRAYUDI LIANTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADHESIVE-LESS SUBSTRATE BONDING TO CARRIER PLATE
- Publication number 20200211883
- Publication date Jul 2, 2020
- Applied Materials, Inc.
- SRISKANTHARAJAH THIRUNAVUKARASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR BONDING SUBSTRATES
- Publication number 20200135690
- Publication date Apr 30, 2020
- Applied Materials, Inc.
- PRAYUDI LIANTO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING WARPAGE IN WAFER LEVEL PACKAG...
- Publication number 20200131624
- Publication date Apr 30, 2020
- Applied Materials, Inc.
- PRAYUDI LIANTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOZZLE FOR UNIFORM PLASMA PROCESSING
- Publication number 20200017972
- Publication date Jan 16, 2020
- Applied Materials, Inc.
- Rohit Mishra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFER CHAMBER
- Publication number 20190326146
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- SRISKANTHARAJAH THIRUNAVUKARASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CASSETTE CARRYING CASE
- Publication number 20190326147
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- SRISKANTHARAJAH THIRUNAVUKARASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS KIT FOR PROCESSING REDUCED SIZED SUBSTRATES
- Publication number 20190259635
- Publication date Aug 22, 2019
- KARRTHIK PARATHITHASAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION RING FOR PROCESSING REDUCED SIZE SUBSTRATES
- Publication number 20190259647
- Publication date Aug 22, 2019
- SRISKANTHARAJAH THIRUNAVUKARASU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR HANDLING VARIOUS SIZED SUBSTRATES
- Publication number 20190252235
- Publication date Aug 15, 2019
- SRISKANTHARAJAH THIRUNAVUKARASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BRIDGING FRONT OPENING UNIFIED POD (FOUP)
- Publication number 20190244845
- Publication date Aug 8, 2019
- Applied Materials, Inc.
- KARRTHIK PARATHITHASAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE BASED SUBSTRATE MAPPER
- Publication number 20180323095
- Publication date Nov 8, 2018
- Eng Sheng Peh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ADHESIVE-LESS CARRIERS FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20180281151
- Publication date Oct 4, 2018
- Applied Materials, Inc.
- Seshadri RAMASWAMI
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR BACKSIDE CLEANING OF SUBSTRATES
- Publication number 20180257116
- Publication date Sep 13, 2018
- SRISKANTHARAJAH THIRUNAVUKARASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CORRECTING SUBSTRATE DEFORMITY
- Publication number 20180218928
- Publication date Aug 2, 2018
- Applied Materials, Inc.
- Eng Sheng PEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID SUBSTRATE CARRIER
- Publication number 20180144969
- Publication date May 24, 2018
- SRISKANTHARAJAH THIRUNAVUKARASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NEXT GENERATION WARPAGE MEASUREMENT SYSTEM
- Publication number 20180144960
- Publication date May 24, 2018
- Applied Materials, Inc.
- JUN-LIANG SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER SYSTEM UTILIZING ELECTROSTATIC CHUCKING TO ACCOMM...
- Publication number 20180112310
- Publication date Apr 26, 2018
- Applied Materials, Inc.
- SRISKANTHARAJAH THIRUNAVUKARASU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR REDUCING SUBSTRATE SLIDING IN PROCESS CHAM...
- Publication number 20170186631
- Publication date Jun 29, 2017
- Applied Materials, Inc.
- SRISKANTHARAJAH THIRUNAVUKARASU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

SRISKANTHARAJAH THIRUNAVUKARASU

Person

Patents Grantslast 30 patents

Methods and apparatus for mask patterning debris removal

Methods and apparatus for warpage correction

Lattice coat surface enhancement for chamber components

Mainframe-less wafer transfer platform with linear transfer system...

Methods and apparatus for controlling warpage in wafer level packag...

Hybrid wafer dicing approach using an actively-focused laser beam l...

Methods for bonding substrates

Substrate vacuum transport and storage apparatus

Methods and apparatus for processing a substrate

Substrate carrier system utilizing electrostatic chucking to accomm...

Nozzle for uniform plasma processing

Sealing structure for workpiece to substrate bonding in a processin...

Apparatus for handling various sized substrates

Adhesive-less substrate bonding to carrier plate

Image based substrate mapper

Hybrid substrate carrier

Substrate carrier for active/passive bonding and de-bonding of a su...

Multi-cassette carrying case

Method and apparatus for backside cleaning of substrates

Bridging front opening unified pod (FOUP)

Nozzle for uniform plasma processing

Next generation warpage measurement system

Substrate transfer chamber

Methods and apparatus for correcting substrate deformity

Apparatus and method for reducing substrate sliding in process cham...

Methods and apparatus for transferring a substrate

Apparatus and method for solid state source array design and fabric...

Method and apparatus for backside cleaning of substrates

Methods and apparatus for nodule control in a titanium-tungsten target

Substrate carrier system utilizing electrostatic chucking to accomm...

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR MASK PATTERNING DEBRIS REMOVAL

METHODS AND APPARATUS FOR MASK PATTERNING DEBRIS REMOVAL

HYBRID WAFER DICING APPROACH USING AN ACTIVELY-FOCUSED LASER BEAM L...

SHADOW RING KIT FOR PLASMA ETCH WAFER SINGULATION PROCESS

METHODS AND APPARATUS FOR WARPAGE CORRECTION

MAINFRAME-LESS WAFER TRANSFER PLATFORM FOR WAFER PROCESSING MODULES

LATTICE COAT SURFACE ENHANCEMENT FOR CHAMBER COMPONENTS

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

METHODS AND APPARATUS FOR CONTACTLESS SUBSTRATE WARPAGE CORRECTION

HYBRID WAFER DICING APPROACH USING AN ACTIVELY-FOCUSED LASER BEAM L...

METHODS AND APPARATUS FOR SUBSTRATE WARPAGE CORRECTION

METHODS AND APPARATUS FOR REMOVING ABRASIVE PARTICLES

ADHESIVE-LESS SUBSTRATE BONDING TO CARRIER PLATE

METHODS FOR BONDING SUBSTRATES

METHODS AND APPARATUS FOR CONTROLLING WARPAGE IN WAFER LEVEL PACKAG...

NOZZLE FOR UNIFORM PLASMA PROCESSING

SUBSTRATE TRANSFER CHAMBER

MULTI-CASSETTE CARRYING CASE

PROCESS KIT FOR PROCESSING REDUCED SIZED SUBSTRATES

DEPOSITION RING FOR PROCESSING REDUCED SIZE SUBSTRATES

APPARATUS FOR HANDLING VARIOUS SIZED SUBSTRATES

BRIDGING FRONT OPENING UNIFIED POD (FOUP)

IMAGE BASED SUBSTRATE MAPPER

ADHESIVE-LESS CARRIERS FOR CHEMICAL MECHANICAL POLISHING

METHOD AND APPARATUS FOR BACKSIDE CLEANING OF SUBSTRATES

METHODS AND APPARATUS FOR CORRECTING SUBSTRATE DEFORMITY

HYBRID SUBSTRATE CARRIER

NEXT GENERATION WARPAGE MEASUREMENT SYSTEM

SUBSTRATE CARRIER SYSTEM UTILIZING ELECTROSTATIC CHUCKING TO ACCOMM...

APPARATUS AND METHOD FOR REDUCING SUBSTRATE SLIDING IN PROCESS CHAM...