Membership
Tour
Register
Log in
Ssu-Yu CHEN
Follow
Person
New Taipei City, TW
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Light source, EUV lithography system, and method for performing cir...
Patent number
11,703,769
Issue date
Jul 18, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chi Yang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Plasma position control for extreme ultraviolet lithography light s...
Patent number
11,650,508
Issue date
May 16, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Ssu-Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV lithography system and method for decreasing debris in EUV lith...
Patent number
11,531,278
Issue date
Dec 20, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Chi Yang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Photolithography device having illuminator and method for adjusting...
Patent number
11,360,392
Issue date
Jun 14, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Che-Chang Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Light source, EUV lithography system, and method for generating EUV...
Patent number
11,333,983
Issue date
May 17, 2022
TAIWAN SEMICONDUCTOR MANFACTURING COMPANY, LTD.
Chi Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for controlling extreme ultraviolet light
Patent number
11,320,744
Issue date
May 3, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Ssu-Yu Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet lithography system with heated tin vane bucket...
Patent number
11,297,710
Issue date
Apr 5, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Ssu-Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet lithography system
Patent number
11,086,237
Issue date
Aug 10, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Ssu-Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source apparatus and method for decreasing debris in radi...
Patent number
10,955,762
Issue date
Mar 23, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chi Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Vessel for extreme ultraviolet radiation source
Patent number
10,877,378
Issue date
Dec 29, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Ssu-Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Light source, EUV lithography system, and method for generating EUV...
Patent number
10,824,083
Issue date
Nov 3, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Chi Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source apparatus
Patent number
10,791,616
Issue date
Sep 29, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Ssu-Yu Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source apparatus, EUV lithography system, and method for...
Patent number
10,712,676
Issue date
Jul 14, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Chi Yang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet radiation source and droplet catcher thereof
Patent number
10,512,147
Issue date
Dec 17, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Chi Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source apparatus, EUV lithography system, and method for...
Patent number
10,495,987
Issue date
Dec 3, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Chi Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
FIRE-SPREADING PREVENTION AND FLAME-RETARDANT MATERIAL
Publication number
20240017106
Publication date
Jan 18, 2024
Cheng Uei Precision Industry Co., LTD.
JEN-KAI HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FIRE-SPREADING PREVENTION BATTERY MODULE
Publication number
20240021917
Publication date
Jan 18, 2024
Cheng Uei Precision Industry Co., LTD.
JEN-KAI HUANG
A62 - LIFE-SAVING FIRE-FIGHTING
Information
Patent Application
METHOD FOR PERFORMING LITHOGRAPHY PROCESS, LIGHT SOURCE, AND EUV LI...
Publication number
20230324813
Publication date
Oct 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chi YANG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PLASMA POSITION CONTROL FOR EXTREME ULTRAVIOLET LITHOGRAPHY LIGHT S...
Publication number
20230273526
Publication date
Aug 31, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ssu-Yu CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LIGHT SOURCE, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR PERFORMING CIR...
Publication number
20220276574
Publication date
Sep 1, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Chi YANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CONTROLLING EXTREME ULTRAVIOLET LIGHT
Publication number
20220260927
Publication date
Aug 18, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Ssu-Yu CHEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM WITH HEATED TIN VANE BUCKET...
Publication number
20220225490
Publication date
Jul 14, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Ssu-Yu CHEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PLASMA POSITION CONTROL FOR EXTREME ULTRAVIOLET LITHOGRAPHY LIGHT S...
Publication number
20210389678
Publication date
Dec 16, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Ssu-Yu CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR CONTROLLING EXTREME ULTRAVIOLET LIGHT
Publication number
20210364931
Publication date
Nov 25, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Ssu-Yu CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM
Publication number
20210364934
Publication date
Nov 25, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Ssu-Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM WITH HEATED TIN VANE BUCKET...
Publication number
20210247702
Publication date
Aug 12, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Ssu-Yu CHEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV LITHOGRAPHY SYSTEM AND METHOD FOR DECREASING DEBRIS IN EUV LITH...
Publication number
20210223708
Publication date
Jul 22, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Chi YANG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LIGHT SOURCE, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR GENERATING EUV...
Publication number
20210055664
Publication date
Feb 25, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Chi YANG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PHOTOGRAPHY DEVICE HAVING ILLUMINATOR AND METHOD FOR ADJUSTING INTE...
Publication number
20210033982
Publication date
Feb 4, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Che-Chang Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM
Publication number
20210033983
Publication date
Feb 4, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Ssu-Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION SOURCE APPARATUS AND METHOD FOR DECREASING DEBRIS IN RADI...
Publication number
20200348607
Publication date
Nov 5, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Chi YANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radiation Source Apparatus
Publication number
20200314990
Publication date
Oct 1, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Ssu-Yu CHEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
VESSEL FOR EXTREME ULTRAVIOLET RADIATION SOURCE
Publication number
20200103758
Publication date
Apr 2, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Ssu-Yu CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION SOURCE APPARATUS, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR...
Publication number
20200073261
Publication date
Mar 5, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Chi YANG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LIGHT SOURCE, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR GENERATING EUV...
Publication number
20190094717
Publication date
Mar 28, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Chi YANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION SOURCE APPARATUS, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR...
Publication number
20190094718
Publication date
Mar 28, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Chi YANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY